Methods of fabricating dielectric films from metal amidinate precursors

Patent metadata

Field	Value
Publication number	US-9269574-B2
Application number	US-201313869182-A
Country	US
Kind code	B2
Filing date	Apr 24, 2013
Priority date	Apr 25, 2012
Publication date	Feb 23, 2016
Grant date	Feb 23, 2016

Abstract

Described are methods for atomic layer deposition of films comprising mixed metal oxides using metal amidinate precursors. The mixed metal oxide films may comprise a lanthanide and a transition metal such as hafnium, zirconium or titanium. Such mixed metal oxide films may be used as dielectric layers in capacitors, transistors, dynamic random access memory cells, resistive random access memory cells, flash memory cells and display panels.

First claim

What is claimed is:

1. A method of depositing a film comprising:
sequentially exposing a surface of a substrate to alternating pulses of a first metal precursor and an oxidant to provide a first metal oxide film on the substrate surface, wherein the first metal is one or more of Hf, Zr or Ti; and
sequentially exposing the first metal oxide film to alternating pulses of an oxidant and a cerium amidinate precursor to provide a film comprising a mixed metal oxide of the first metal and cerium, wherein the cerium amidinate precursor has a structure represented by:

wherein R, R′ and R″ are each independently hydrogen, C 1-8 alkyl, aryl, acyl, aldehyde, keto, C 2-4 alkenyl, alkynyl, or CF 3 , L n are n ligands selected from one or more of hydride, alkylamide, dialkylamide, alkoxide, beta-diketonate, ketoiminate, cyclopentadienyl, C 1-8 alkyl, C 2-8 alkenyl, C 2-8 alkynyl, CF 3 , halide, imidazolate, pyridinium, amidinate and guanidinate, n is a number from 1-3, and with each L independently being the same or different ligand as another L.

2. The method of claim 1 , wherein the first metal precursor has a formula represented by M 1 L n , wherein M 1 is selected from Hf, Zr and Ti, L n are n ligands selected from one or more of hydride, alkylamide, dialkylamide, alkoxide, beta-diketonate, ketoiminate, cyclopentadienyl, C 1-8 alkyl, C 2-8 alkenyl, C 2-8 alkynyl, CF 3 , halide, imidazolate, pyridinium, amidinate and guanidinate, n is a number from 1-4, and with each L independently being the same or different ligand as another L.

3. The method of claim 1 , wherein the film comprising a mixed metal oxide is a mixed metal oxide film, a mixed metal oxynitride film, a mixed metal silicate film, or a nitrided mixed metal silicate film.

4. The method of claim 1 , wherein the first metal is Hf.

5. The method of claim 4 , wherein the mixed metal oxide film comprises 1 to 30 mole percent cerium, based on the total moles of cerium and hafnium in the film.

6. The method of claim 1 , wherein the oxidant comprises one or more of H 2 O, H 2 O 2 , O 2 , O 3 , N 2 O, NO, NOx, a nitrate, an alcohol, a carboxylic acid, CO, CO 2 , and HCOH.

7. The method of claim 1 , further comprising annealing the mixed metal oxide film.

Assignees

• Hung Steven
• Noori Atif
• Thompson David
• Senzaki Yoshihide
• Applied Materials Inc

Inventors

• Hung Steven
• Noori Atif
• Thompson David
• Senzaki Yoshihide

Classifications

• H10P14/69397

  the material containing two or more metal elements · CPC title

• H10P14/69396

  the material containing at least one rare earth metal element, e.g. oxides of lanthanides, scandium or yttrium · CPC title

• H10P14/69395

  the material containing zirconium, e.g. ZrO2 · CPC title

• H10P14/69394

  the material containing titanium, e.g. TiO2 · CPC title

• H10P14/69392 Primary

  the material containing hafnium, e.g. HfO2 · CPC title