Optical scanning apparatus and scanning microscope apparatus

Patent metadata

Field	Value
Publication number	US-9268133-B2
Application number	US-201414279950-A
Country	US
Kind code	B2
Filing date	May 16, 2014
Priority date	Nov 28, 2011
Publication date	Feb 23, 2016
Grant date	Feb 23, 2016

Abstract

Provided is an optical scanning apparatus including: a deflector capable of deflecting an entering beam while switching an advancing direction thereof among a plurality of direction at a predetermined switching timing; a mirror array including a plurality of angle setting mirrors that are placed at angles different from one another on respective optical paths of the beams deflected by the deflector, each of the angle setting mirrors reflecting the beam while giving thereto a relative angle on the same plane for each optical path, and gathering the beam on the same point; and a first scanner that is provided so as to be swingable about an axial line perpendicular to the plane in synchronization with the switching timing, the first scanner reflecting each beam that is caused by the mirror array to enter the same point from a different direction and applying for scanning the beam along the same trajectory.

First claim

The invention claimed is:

1. An optical scanning apparatus comprising:
a deflector capable of deflecting an entering laser beam while switching an advancing direction thereof among a plurality of direction at a predetermined switching timing;
an angle setting unit including a plurality of angle setting mirrors that are placed at angles different from one another on respective optical paths of the laser beams deflected by the deflector, each of the angle setting mirrors reflectin…

Assignees

• Olympus Corp

Inventors

• Takahashi Shintaro

Classifications

• G02B21/002

  Physics · mapped topic

• G02B26/101

  Physics · mapped topic

• G02B26/105 Primary

  Physics · mapped topic