Radiation image acquisition device

Patent metadata

Field	Value
Publication number	US-9268039-B2
Application number	US-201113981490-A
Country	US
Kind code	B2
Filing date	Oct 21, 2011
Priority date	Jan 25, 2011
Publication date	Feb 23, 2016
Grant date	Feb 23, 2016

Abstract

A radiation image acquisition device includes: a radiation source which emits radiation; a wavelength conversion member of a flat plate shape which generates scintillation light according to incidence of the radiation emitted from the radiation source and transmitted by an object; first imaging means which condenses and images the scintillation light emitted from an entrance surface for the radiation in the wavelength conversion member in a direction inclined with respect to a direction of a normal to the entrance surface; and second imaging means which condenses and images the scintillation light emitted from a surface opposite to the entrance surface in the wavelength conversion member in a direction inclined with respect to a direction of a normal to the opposite surface.

First claim

The invention claimed is:

1. A radiation image acquisition device comprising:
a radiation source configured to emit radiation;
a wavelength conversion member of a flat plate shape configured to generate scintillation light according to incidence of the radiation emitted from the radiation source and transmitted by an object;
first imaging means configured to condense and image the scintillation light emitted from an entrance surface for the radiation in the wavelength conversion member in a direction inclined with respect to a direction of a normal to the entrance surface; and
second imaging means configured to condense and image the scintillation light emitted from a surface opposite to the entrance surface in the wavelength conversion member in a direction inclined with respect to a direction of a normal to the opposite surface,
wherein a condensing lens unit of the first imaging means is configured to focus on the entrance surface and condense the scintillation light emitted in the direction inclined with respect to the normal to the entrance surface from the entrance surface toward an imaging unit, and
wherein a condensing lens unit of the second imaging means is configured to focus on the opposite surface and condense the scintillation light emitted in the direction inclined with respect to the normal to the opposite surface from the opposite surface toward an imaging unit.

2. The radiation image acquisition device according to claim 1 ,
wherein each of the first imaging means and the second imaging means has:
a condensing lens unit configured to condense the scintillation light emitted from the wavelength conversion member; and
an imaging unit configured to image the scintillation light thus condensed.

3. The radiation image acquisition device according to claim 1 ,
wherein an angle of inclination with respect to the direction of the normal to the entrance surface of the scintillation light condensed by the first imaging means and an angle of inclination with respect to the direction of the normal to the opposite surface of the scintillation light condensed by the second imaging means are equal to one another.

4. The radiation image acquisition device according to claim 3 ,
wherein the radiation source is arranged on the normal to the entrance surface.

5. The radiation image acquisition device according to claim 3 ,
wherein the radiation source is arranged so that an optical axis of the radiation makes a predetermined angle with respect to the normal to the entrance surface.

6. The radiation image acquisition device according to claim 1 ,
wherein the first imaging means and the second imaging means are arranged in plane symmetry with respect to the wavelength conversion member.

7. The radiation image acquisition device according to claim 6 ,
wherein the radiation source is arranged on the normal to the entrance surface.

8. The radiation image acquisition device according to claim 6 ,
wherein the radiation source is arranged so that an optical axis of the radiation makes a predetermined angle with respect to the normal to the entrance surface.

9. The radiation image acquisition device according to claim 1 ,
wherein an optical axis of the condensing lens unit of the first imaging means and an optical axis of the condensing lens unit of the second imaging means are positioned on opposite sides from one another, with the normal to the entrance surface and the normal to the opposite surface as references.

10. The radiation image acquisition device according to claim 9 ,
wherein the radiation source is arranged so that an optical axis of the radiation makes a predetermined angle with respect to the normal to the entrance surface.

11. The radiation image acquisition device according to claim 1 ,
wherein an angle of inclination to the direction of the normal to the entrance surface, of the scintillation light to be condensed by the first imaging means is different from an angle of inclination to the direction of the normal to the opposite surface, of the scintillation light to be condensed by the second imaging means,
said radiation image acquisition device further comprising:
correction means configured to correct at least one of an image taken by the first imaging means and an image taken by the second imaging means.

12. The radiation image acquisition device according to claim 1 ,
wherein the radiation source is arranged on the normal to the entrance surface.

13. The radiation image acquisition device according to claim 1 ,
wherein the radiation source is arranged so that an optical axis of the radiation makes a predetermined angle with respect to the normal to the entrance surface.

14. The radiation image acquisition device according to claim 1 ,
wherein an optical path length from the entrance surface to the first imaging means is equal to an optical path length from the opposite surface to the second imaging means.

15. The radiation image acquisition device according to claim 1 ,
wherein the first and second imaging means are configured so as to perform imaging simultaneously.

16. The radiation image acquisition device according to claim 1 ,
wherein the object is a semiconductor device,
said radiation image acquisition device being applied to a semiconductor failure inspection device an inspection target of which is the semiconductor device.

17. The radiation image acquisition device according to claim 1 ,
wherein the object is an electronic component.

Assignees

• SUGIYAMA Mototsugu
• Suyama Toshiyasu
• Hamamatsu Photonics Kk

Inventors

• SUGIYAMA Mototsugu
• Suyama Toshiyasu

Classifications

• G01T1/20

  with scintillation detectors · CPC title

• G01T1/2002 Primary

  Optical details, e.g. reflecting or diffusing layers · CPC title

• G01N23/04 Primary

  and forming images of the material · CPC title