Method for the absolute measurement of the flatness of the surfaces of optical elements, using an interferometer and a three-flat method

Patent metadata

Field	Value
Publication number	US-9267789-B2
Application number	US-201214236487-A
Country	US
Kind code	B2
Filing date	Aug 3, 2012
Priority date	Aug 5, 2011
Publication date	Feb 23, 2016
Grant date	Feb 23, 2016

Abstract

A method for absolute measurement of flatness of surfaces of optical elements. In the method, an interferometer having a measurement axis is used for applying a three-flat method to three optical elements, by conducting actual measurements on the elements, surfaces of the elements are reconstructed by an iterative processing operation in which measurements are simulated and simulated measurements are compared with the actual measurements. At least two actual measurements are made after having performed a rotation around the measurement axis and/or a translation perpendicular to the measured axis, of a measured optical element relative to the other.

First claim

The invention claimed is:

1. A method for absolute measurement of flatness of surfaces of optical elements, comprising:
using an interferometer having a measurement axis and including a reference surface position and a test surface position for applying a three-flat method to three optical elements, by conducting actual measurements on the three optical elements, the actual measurements respectively providing interferograms; and
reconstructing respective planes of the three optical elements by an iterative processing operation in which the actual measurements are mathematically simulated and simulated measurements are compared with the actual measurements;
wherein each actual measurement is carried out by placing the respective surfaces of two of the three optical elements facing each other, respectively in a reference surface position and in a test surface position, and
wherein at least one of the actual measurements is made after having performed a rotation around the measurement axis, and another actual measurement is made after having performed a translation perpendicular to the measurement axis of one of the two optical elements relative to the other.

2. The method according to claim 1 , wherein the interferometer is an interferometer of Fizeau type.

3. The method according to claim 1 , wherein at least two rotations are performed around the measurement axis and respective angles of both rotations differ from each other by more than 10°.

4. The method according to claim 1 , wherein each rotation is performed according to an angle which is not a sub-multiple of 360°.

5. The method according to claim 1 , wherein a translation shift is determined in a plane perpendicular to the measurement axis and a rotational shift is determined around the measurement axis.

6. The method according to claim 5 , wherein a zoom shift is further determined in the plane perpendicular to the measurement axis.

7. The method according to claim 5 , wherein interferograms of both actual measurements are divided into plural portions, correlation products between corresponding portions are calculated, respective positions of correlation peaks corresponding to the correlation products are determined, and each shift is determined from the determined respective positions.

8. The method according to claim 7 , wherein each interferogram is divided into nine portions that form a 3×3 matrix.

9. The method according to claim 7 , wherein gradients of the portions are determined and the correlation products between corresponding gradients are calculated.

10. The method according to claim 7 , wherein a position of each correlation peak is determined by a barycentric calculation.

Assignees

• Bouillet Stephane
• Morin Chloe
• Commissariat à l'énergie atomique et aux énergies alternatives

Inventors

• Bouillet Stephane
• Morin Chloe

Classifications

• G01B9/02018

  Multipass interferometers, e.g. double-pass · CPC title

• G01B9/02057

  by using common path configuration, i.e. reference and object path almost entirely overlapping · CPC title

• G01B11/2441 Primary

  using interferometry · CPC title

• G01B2290/25

  Fabry-Perot in interferometer, e.g. etalon, cavity · CPC title

• G01B9/02087

  Combining two or more images of the same region · CPC title