Ultrashort laser pulse wafer scribing
US-9221124-B2 · Dec 29, 2015 · US
US9267461B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9267461-B2 |
| Application number | US-66395208-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 11, 2008 |
| Priority date | Jun 11, 2007 |
| Publication date | Feb 23, 2016 |
| Grant date | Feb 23, 2016 |
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Provided is a wire rod for an I-type oil ring, which includes right and left rail portions and a web portion connecting the rail portions, which has an oil hole or a molten through hole formed in the web portion, and which has a circumscribing circle diameter of 10 mm or less in its transverse contour. The molten through hole has such a remolten portion formed on its exit side as encloses the exit of the molten through hole. The remolten portion exceeds such a molten portion in the transverse section along the center of the molten through hole as is formed in the molten through hole, and is formed to have 200 μm or less from the outer circumference of the molten through hole and 100 μm or less in the depth direction of the molten through hole.
Opening claim text (preview).
The invention claimed is: 1. A wire for I-shape oil rings, comprising: a left and a right rail sections, and a web section connecting the rail sections with each other and having oil holes as through holes formed by melting, the wire having a diameter of not more than 10 mm which is defined by a circle circumscribing a contour of a cross section of the wire, a melted and solidified region formed on an inner side of each of the through holes so as to extend along a depth of the through holes, wherein an inlet of each of the through holes is located on an incident side of the web section on which a laser is incident for forming the through holes, a remelted and solidified portion formed by integrating the wire for an I-shape oil ring and solidified residues, wherein the remelted and solidified portion does not exist on the incident side of the through holes and is formed at a peripheral portion of an outlet of each of the through holes, wherein the remelted and solidified portion extends past the melted and solidified region around the through hole but does not extend more than 200 μm from the periphery of the through hole, when viewing a cross section of the wire taken along the axis of the through hole, and wherein the remelted and solidified portion is formed so as not to exceed 100 μm in the depth direction from the outlet of the through hole, and wherein a diameter of an outlet of the through hole is smaller than a diameter of an inlet of the through hole. 2. The wire for I-shape oil rings, according to claim 1 , wherein the through holes are formed in a direction from a smaller opening angle side toward a larger opening angle side of the wire when viewing a cross section of the wire. 3. The wire for I-shape oil rings, according to claim 1 , wherein a height of projections of the through hole on upper and lower surfaces of the wire is not more than 30 μm. 4. The wire for I-shape oil rings, according to claim 2 , wherein a height of projections of the through hole on upper and lower surfaces of the wire is not more than 30 μm.
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