Apparatus and method for treating substrate

Patent metadata

Field	Value
Publication number	US-9263307-B2
Application number	US-201213485300-A
Country	US
Kind code	B2
Filing date	May 31, 2012
Priority date	May 31, 2011
Publication date	Feb 16, 2016
Grant date	Feb 16, 2016

Abstract

Provided are an apparatus and method for treating a substrate, and more particularly, to a substrate treatment apparatus having a cluster structure and a substrate treatment method using the same. The apparatus for treating the substrate includes a load port on which a container for receiving the substrate is placed, a treatment module for treating the substrate, and a transfer module including a robot for transferring the substrate between the container and the treatment module. The treatment module includes a transfer chamber including a robot for transferring the substrate, a load lock chamber disposed between the transfer chamber and the transfer module, a first treatment chamber disposed spaced from the transfer module around the transfer chamber to perform a first treatment process, and a second treatment chamber disposed around the transfer chamber to perform a second treatment process.

First claim

What is claimed is:

1. An apparatus for treating a substrate, the apparatus comprising:
a load port on which a container for receiving the substrate is placed;
a treatment module for treating the substrate; and
a transfer module comprising a robot for transferring the substrate between the container and the treatment module;
wherein the treatment module comprises:
a transfer chamber comprising a robot for transferring the substrate,
a load lock chamber disposed between th…

Assignees

• Kim Hyung Joon
• Semes Co Ltd

Inventors

• Kim Hyung Joon

Classifications

• H10P72/0466 Primary

  Electricity · mapped topic

• Y10T156/11

  Cross-Sectional Technologies · mapped topic

• H01L21/67201 Primary

  Electricity · mapped topic

• H10P72/33

  Electricity · mapped topic

• H10P72/0464 Primary

  Electricity · mapped topic