Vertical cavity surface emitting laser and atomic oscillator

Patent metadata

Field	Value
Publication number	US-9257816-B2
Application number	US-201414574932-A
Country	US
Kind code	B2
Filing date	Dec 18, 2014
Priority date	Dec 20, 2013
Publication date	Feb 9, 2016
Grant date	Feb 9, 2016

Abstract

A vertical cavity surface emitting laser includes: a substrate; a first mirror layer; an active layer; a second mirror layer; a first electrode which is electrically connected to the first mirror layer; a second electrode which is electrically connected to the second mirror layer; and a pad which is electrically connected to the second electrode, in which the first mirror layer, the active layer, and the second mirror layer configure a laminated body, the laminated body includes a resonance portion, an insulation layer is provided on a side surface of the laminated body, in a plan view, the insulation layer has a shape line-symmetrical with respect to a virtual straight line passing through a center of the resonance portion, the pad is provided over the insulation layer, and in the plan view, the pad is only provided on one side of the virtual straight line.

First claim

What is claimed is:

1. A vertical cavity surface emitting laser comprising:
a substrate;
a first mirror layer which is provided over the substrate;
an active layer which is provided over the first mirror layer;
a second mirror layer which is provided over the active layer;
a first electrode which is electrically connected to the first mirror layer;
a second electrode which is electrically connected to the second mirror layer; and
a pad which is electrically connected to the second electrode,
wherein the first mirror layer, the active layer, and the second mirror layer configure a laminated body,
the laminated body includes a resonance portion which resonates light generated by the active layer,
an insulation layer is provided on a side surface of the laminated body, and the first mirror layer extends outward from the insulation layer in a plan view,
in the plan view, the insulation layer has a shape line-symmetrical with respect to a virtual straight line passing through a center of the resonance portion,
the pad is provided over the insulation layer, and
in the plan view, the pad is only provided on one side of the virtual straight line.

2. The vertical cavity surface emitting laser according to claim 1 , further comprising:
a lead-out wiring which electrically connects the second electrode and the pad to each other.

3. The vertical cavity surface emitting laser according to claim 2 ,
wherein, in the plan view, the lead-out wiring is only provided on the one side of the virtual straight line.

4. The vertical cavity surface emitting laser according to claim 1 ,
wherein the laminated body includes a first distortion imparting portion and a second distortion imparting portion,
the resonance portion is provided between the first distortion imparting portion and the second distortion imparting portion, and
in the plan view, the virtual straight line is orthogonal to a direction in which the first distortion imparting portion and the second distortion imparting portion face each other.

5. An atomic oscillator comprising:
the vertical cavity surface emitting laser according to claim 1 .

6. An atomic oscillator comprising:
the vertical cavity surface emitting laser according to claim 2 .

7. An atomic oscillator comprising:
the vertical cavity surface emitting laser according to claim 3 .

8. An atomic oscillator comprising:
the vertical cavity surface emitting laser according to claim 4 .

Assignees

• Seiko Epson Corp

Inventors

• Nishida Tetsuo

Classifications

• H01S5/3201

  incorporating bulkstrain effects, e.g. strain compensation, strain related to polarisation · CPC title

• H01S5/18352

  Mesa with inclined sidewall · CPC title

• H01S5/04257

  having positive and negative electrodes on the same side of the substrate · CPC title

• H01S5/1835 Primary

  Non-circular mesa · CPC title

• H01S2301/176

  Specific passivation layers on surfaces other than the emission facet · CPC title