Method for fabricating single electron transistor having nanoparticles of uniform pattern arrangement

Patent metadata

Field	Value
Publication number	US-9257660-B2
Application number	US-201414199572-A
Country	US
Kind code	B2
Filing date	Mar 6, 2014
Priority date	Mar 6, 2013
Publication date	Feb 9, 2016
Grant date	Feb 9, 2016

Abstract

A transistor and a fabrication method thereof. A transistor includes a channel region including linkers, formed on a substrate, and metallic nanoparticles grown from metal ions bonded to the linkers, a source region disposed at one end of the channel region, a drain region disposed at the other end of the channel region opposite of the source region, and a gate coupled to the channel region and serving to control migration of charges in the channel region. The metallic nanoparticles have a substantially uniform pattern arrangement in the channel region.

First claim

What is claimed is:

1. A method for forming a channel of a transistor, comprising:
forming a substrate;
forming a porous mask which has a plurality of pores, on the substrate;
forming linkers on the substrate which is selectively exposed by the porous mask;
bonding metal ions to the linkers; and
forming metallic nanoparticles from the metal ions, the metal ions being previously bonded to the linkers formed on the substrate prior to forming the metallic nanoparticles.

2. The method of claim 1 , further comprising:
bonding at least one of a dielectric inorganic material and an inorganic oxide to the metallic nanoparticles.

3. The method of claim 1 , further comprising:
applying energy in forming metallic nanoparticles; and
supplying an organic surfactant including at least one of a first organic material and a second organic material, before or/and during the applying of the energy.

4. The method of claim 1 ,
wherein the substrate includes a surface layer, and
wherein the surface layer includes, as a material that spontaneously bonds with the linkers, a metal, a metal oxide, a semiconductor, a semiconductor oxide, a composite metal oxide, or a stack thereof.

5. The method of claim 1 , wherein the porous mask comprises a single layer of nanobeads as a material, which does not spontaneously bond with the linkers.

6. The method of claim 1 , wherein, before the forming of the linkers, the method further comprises:
forming a thin layer of a material which spontaneously bonds with the linkers on the substrate which is selectively exposed by the porous mask; and
removing the porous mask.

7. The method of claim 5 , wherein the material which spontaneously bonds with the linkers includes a metal, a metal oxide, a semiconductor, a semiconductor oxide, a composite metal oxide, or a stack thereof.

8. The method of claim 1 , wherein the linkers are organic monomolecules, and the channel comprises a linker layer composed of a self-assembled monomolecular layer formed by the organic monomolecules.

9. The method of claim 8 , wherein the linker layer is formed by bringing a surface of the substrate into contact with a linker solution in which the linkers are dissolved in a solvent.

10. The method of claim 1 ,
wherein a plurality of the linkers are bonded to the substrate to form a linker layer, and
wherein the linker layer is formed by atomic layer deposition using a gas containing the linkers.

11. The method of claim 10 , wherein the linker layer is a silane compound layer comprising a functional group selected from a group composed of an amine group, a carboxyl group and a thiol group.

12. The method of claim 1 , wherein the linkers comprise one functional group selected from among a group including an amine group, a carboxyl group and a thiol group, which bonds with the metal ions.

13. The method of claim 3 , wherein the bonding of the metal ions comprises bringing a metal precursor into contact with the substrate, which is formed with the linkers.

14. The method of claim 1 , wherein the bonding of the metal ions comprises applying a solution of a metal precursor to the substrate, which is formed with the linkers, or supplying a gaseous metal precursor to the substrate, which is formed with the linkers.

15. The method of claim 1 , wherein energy is applied in forming metallic nanoparticles; and the energy is at least one selected from the group including heat energy, chemical energy, light energy, vibration energy, ion beam energy, electron beam energy, and radiation energy.

16. The method of claim 1 , wherein energy is applied in forming metallic nanoparticles; and a different kind of element from the metal ions is supplied during application of the energy to transform the metallic nanoparticles into one selected from the group including metal nanoparticles, metal oxide nanoparticles, metal nitride nanoparticles, metal carbide nanoparticles and intermetallic compound nanoparticles.

17. The method of claim 1 , wherein the metallic nanoparticles are formed through in situ reduction and growth of the linker-bonded metal ions.

18. A method of semiconductor fabrication, comprising:
forming a substrate with a channel region;
forming a porous mask with a plurality of pores in a channel region that selectively exposes the substrate;
forming linkers on the channel region of the substrate, which is selectively exposed by the porous mask;
bonding metal ions to the linkers; and
forming metallic nanoparticles from the metal ions, the metal ions being previously bonded to the linkers formed on the substrate prior to forming the metallic nanoparticles.

19. The method of claim 18 , wherein the linkers comprises a functional group chemically bonded with metal ions, and
wherein the functional group includes an amine group, a carboxyl group, a thiol group, or a combination thereof.

20. The method of claim 18 , wherein the metallic nanoparticles are formed through in situ reduction and growth of the linker-bonded metal ions.

Assignees

• Sk Innovation Co Ltd

Inventors

• Kim Jun-Hyung
• Lee Young-Keun
• You Hong
• Kim Tae-Hee

Classifications

• H10K10/488

  the channel region comprising a layer of composite material having interpenetrating or embedded materials, e.g. a mixture of donor and acceptor moieties, that form a bulk heterojunction · CPC title

• H10K10/484 Primary

  characterised by the channel regions · CPC title

• H01L51/0001

  Electricity · mapped topic

• H01L51/0566 Primary

  Electricity · mapped topic

• H01L51/0558

  Electricity · mapped topic