Avalanche diode having an enhanced defect concentration level and method of making the same

Patent metadata

Field	Value
Publication number	US-9257523-B2
Application number	US-201414304701-A
Country	US
Kind code	B2
Filing date	Jun 13, 2014
Priority date	Jan 21, 2008
Publication date	Feb 9, 2016
Grant date	Feb 9, 2016

Abstract

The invention relates to an avalanche diode that can be employed as an ESD protection device. An avalanche ignition region is formed at the p-n junction of the diode and includes an enhanced defect concentration level to provide rapid onset of avalanche current. The avalanche ignition region is preferably formed wider than the diode depletion zone, and is preferably created by placement, preferably by ion implantation, of an atomic specie different from that of the principal device structure. The doping concentration of the placed atomic specie should be sufficiently high to ensure substantially immediate onset of avalanche current when the diode breakdown voltage is exceeded. The new atomic specie preferably comprises argon or nitrogen, but other atomic species can be employed. However, other means of increasing a defect concentration level in the diode depletion zone, such as an altered annealing program, are also contemplated.

First claim

What is claimed is:

1. A method of forming an avalanche diode, the method comprising:
forming a second diode region next to a first diode region, the second diode region oppositely doped from the first diode region;
forming an avalanche ignition region surrounding a junction of the first diode region and the second diode region with a defect concentration level greater than a defect concentration level of the first diode region and the second diode region; and
forming a depletion zone surrounding the junction of the first diode region with the second diode region, wherein the avalanche ignition region extends deeper into the first diode region and the second diode region than the depletion zone so as to surround the depletion zone.

2. The method as claimed in claim 1 , wherein the depletion zone is created by applying a reverse voltage to the avalanche diode.

3. The method as claimed in claim 1 , wherein the avalanche ignition region comprises an atomic species different from an atomic species forming a principle structure of the first diode region and the second diode region.

4. The method as claimed in claim 3 , wherein the atomic species is a neutral atomic species.

5. The method as claimed in claim 4 , wherein the neutral atomic species comprises argon, nitrogen, carbon, germanium or gold.

6. The method as claimed in claim 1 , further comprising forming the first diode region on a silicon substrate.

7. A method of forming an avalanche diode, the method comprising:
forming an anode region adjoining a cathode region thereby forming a junction, the anode region oppositely doped from the cathode region;
forming an avalanche ignition region surrounding the junction of the anode region and the cathode region with a defect concentration level greater than a defect concentration level of the anode region and the cathode region; and
forming a depletion zone surrounding the junction of the anode region with the cathode region, wherein the avalanche ignition region extends deeper into the anode region and the cathode region than the depletion zone so as to surround the depletion zone.

8. The method as claimed in claim 7 , wherein forming the avalanche ignition region comprises implanting an atomic species into the anode region and the cathode region.

9. The method as claimed in claim 8 , wherein implanting the atomic species comprises implanting the atomic species with a doping concentration of at least 10 15 per cm 3 .

10. The method as claimed in claim 8 , wherein the atomic species is a neutral atomic species.

11. The method as claimed in claim 10 , wherein the neutral atomic species comprises argon, nitrogen, carbon, germanium or gold.

12. The method as claimed in claim 7 , further comprising forming the anode region on a silicon substrate.

13. A method of forming an avalanche diode, the method comprising:
forming a buried layer having a first doping type in a substrate having a second doping type, wherein the second doping type is opposite to the first doping type;
forming a first well having the first doping type over the buried layer;
forming a second well having the second doping type within the first well; and
forming an avalanche ignition region surrounding a junction of the second well and the buried layer, wherein the avalanche ignition region has a defect concentration level greater than a defect concentration level of the second well and the buried layer, wherein the avalanche ignition region extends deeper into the second well and the buried layer than a depletion zone surrounding the junction so as to surround the depletion zone.

14. The method as claimed in claim 13 , wherein forming the avalanche ignition region comprises implanting an atomic species into the second well and the buried layer.

15. The method as claimed in claim 14 , wherein implanting the atomic species comprises implanting the atomic species with a doping concentration of at least 10 15 per cm 3 .

16. The method as claimed in claim 14 , wherein the atomic species is a neutral atomic species.

17. The method as claimed in claim 16 , wherein the neutral atomic species comprises argon, nitrogen, carbon, germanium or gold.

18. The method as claimed in claim 13 , wherein the substrate is a silicon substrate.

Assignees

• Infineon Technologies Ag

Inventors

• Schneider Jens
• Esmark Kai
• Wendel Martin

Classifications

• H10P36/03

  within silicon bodies · CPC title

• H10P30/208

  of electrically inactive species · CPC title

• H10P30/204

  into Group IV semiconductors · CPC title

• H10W42/80

  protecting against overcurrent or overload, e.g. fuses or shunts (integrated devices comprising arrangements for electrical protection H10D89/60) · CPC title

• H10D62/128

  Anode regions of diodes · CPC title