System and method for detecting cracks in a wafer

Patent metadata

Field	Value
Publication number	US-9255894-B2
Application number	US-201314073535-A
Country	US
Kind code	B2
Filing date	Nov 6, 2013
Priority date	Nov 9, 2012
Publication date	Feb 9, 2016
Grant date	Feb 9, 2016

Abstract

A wafer crack detection system includes a rotational wafer stage assembly configured to secure a wafer and selectively rotate the wafer, a light source positioned on a first side of the wafer and configured to direct a light beam through the wafer, a sensor positioned on a second side of the wafer and configured to monitor one or more characteristics of light transmitted through the wafer as the wafer is rotated, and a controller communicatively coupled to the sensor and a portion of the rotational wafer stage assembly, the controller configured to: determine the presence of one or more cracks in the wafer based on the monitored one or more characteristics of light transmitted through the wafer, and, responsive to the determination of the presence of one or more cracks in the wafer, direct the rotational stage assembly to adjust the rotational condition of the wafer.

First claim

What is claimed is:

1. A system for detecting cracks in a wafer comprising:
a rotational wafer stage assembly configured to secure the wafer and selectively rotate the wafer, wherein the rotational wafer stage assembly includes a spindle;
a light source positioned on a first side of a surface of the wafer and configured to direct at least a portion of a light beam through the wafer, wherein the light beam is at least partially transmittable through the wafer;
a sensor positioned on a second side of the wafer opposite the first side and configured to monitor one or more characteristics of light transmitted through the wafer as the rotational wafer stage assembly rotates the wafer, wherein the rotational wafer stage assembly and the light source are configured to cause the light beam to trace a pattern across the wafer; and
a controller communicatively coupled to the sensor and a portion of the rotational wafer stage assembly including the spindle, wherein the controller is configured to determine the presence of one or more cracks in the wafer based on the monitored one or more characteristics of light transmitted through the wafer,
wherein the spindle adjusts the rotational condition of the wafer in response to the determination of the presence of one or more cracks by the controller.

2. The system of claim 1 , wherein the rotational wafer stage assembly includes a wafer chuck configured to secure the wafer.

3. The system of claim 1 , wherein the rotational wafer stage assembly is configured to rotate the wafer about an axis perpendicular to the wafer surface.

4. The system of claim 1 , wherein the rotational wafer stage assembly and the light source are configured to cause the light beam to trace substantially a circle pattern over the surface of the wafer.

5. The system of claim 4 , wherein the light source is configured to direct a light beam onto the wafer at a location between the laser scribe line of the wafer and the bevel of the wafer such that the light beam substantially traces the circle pattern over the surface of the wafer bounded by the laser scribe of the wafer and the bevel of the wafer.

6. The system of claim 1 , wherein the rotational wafer stage assembly and the light source are configured to cause the light beam to trace substantially a spiral pattern over the wafer.

7. The system of claim 6 , wherein the light source is disposed on a linear stage, wherein the combined operation of the rotational wafer stage assembly and the linear stage of the light source cause the light beam to trace substantially the spiral pattern over the wafer.

8. The system of claim 6 , wherein the light source is fixed, wherein the rotational wafer stage assembly is configured cause the light beam to trace substantially the spiral pattern over the wafer.

9. The system of claim 1 , wherein the one or more characteristics of the transmitted light include the intensity of transmitted light.

10. The system of claim 1 , wherein the light source comprises:
an infrared laser.

11. The system of claim 1 , wherein the light source emits at least 1550 nm light.

12. The system of claim 1 , wherein the sensor comprises:
at least one of a photodiode, a CCD detector and a CMOS detector.

13. The system of claim 1 , wherein the plane of the wafer is located at least proximate to the focus of the light beam.

14. The system of claim 1 , wherein the control system is further configured to compare the monitored one or more characteristics of the light beam to a selected response threshold.

15. The system of claim 1 , wherein the adjustment of the rotational condition of the wafer by the spindle in response to the determination of the presence of one or more cracks by the controller includes stopping the rotation of the wafer.

16. The system of claim 1 , wherein the adjustment of the rotational condition of the wafer by the spindle in response to the determination of the presence of one or more cracks by the controller includes reducing the speed of rotation of the wafer.

17. The system of claim 1 , wherein the light source and the sensor are fixed.

18. The system of claim 1 , wherein at least one of the light source and the sensor are disposed on an actuatable stage.

19. An inspection tool equipped with crack detection capabilities comprising:
a light source configured to illuminate an area of a surface of the wafer disposed on a rotational wafer stage assembly configured to secure the wafer and selectively rotate the wafer, wherein the rotational wafer stage assembly includes a spindle;
a detector configured to detect light reflected or scattered from the illuminated area of the wafer;
a crack detection light source positioned on a first side of a surface of the wafer and configured direct at least a portion of a light beam through the wafer, wherein the light beam is at least partially transmittable through the wafer;
a crack detection sensor positioned on a second side of the wafer opposite the first side and configured to monitor one or more characteristics of light transmitted through the wafer as the rotational wafer stage assembly rotates the wafer, wherein the rotational wafer stage assembly and the light source are configured to cause the light beam to trace a pattern across the wafer; and
a controller communicatively coupled to the sensor and a portion of the rotational wafer stage assembly including the spindle, wherein the controller is configured to determine the presence of one or more cracks in the wafer based on the monitored one or more characteristics of light transmitted through the wafer,
wherein the spindle is configured to adjust the rotational condition of the wafer in response to the determination of the presence of one or more cracks by the controller.

20. The inspection tool of claim 19 , wherein the inspection tool is configured as at least one of a bright-field inspection tool and a dark-field inspection tool.

21. A method for detecting cracks in a wafer comprising:
generating a light beam at least partially transmittable through the wafer with a light source positioned on a first side of the wafer, wherein the light source is configured to direct at least a portion of a light beam through the wafer;
selectively rotating a wafer disposed on a rotational wafer stage assembly including a spindle in order to trace the light beam across the surface of the wafer;
monitoring one or more characteristics of light transmitted through the wafer with a sensor positioned on a second side of the wafer opposite the first side and configured to monitor one or more characteristics of light transmitted through the wafer as the rotational wafer stage assembly rotates the wafer, wherein the rotational wafer stage assembly and the light source cause the light beam to trace a pattern across the wafer;
determining the presence of one or more cracks in the wafer based on the monitored one or more characteristics of light transmitted through the wafer; and
adjusting the rotational condition of the wafer, with the spindle, in response to the determination of the presence of one or more cracks in the wafer.

22. A system for monitoring centering of wafer on a rotational wafer stage comprising:
a rotational wafer stage assembly configured to secure a wafer and selectively rotate the wafer, wherein the rotational wafer stage assembly includes a spindle;
a light source positioned on a first side of a surface of the wafer and configured direct at least a portion of a light beam through the

Assignees

• Kla Tencor Corp

Inventors

• Vanhoomissen William
• Wheeler Sean

Classifications

• G01N21/9505 Primary

  Wafer internal defects, e.g. microcracks · CPC title