2D programmable aperture mechanism

Patent metadata

Field	Value
Publication number	US-9255887-B2
Application number	US-201414304373-A
Country	US
Kind code	B2
Filing date	Jun 13, 2014
Priority date	Jun 19, 2013
Publication date	Feb 9, 2016
Grant date	Feb 9, 2016

Abstract

Methods and systems for reconfiguring an aperture of an optical inspection system are presented. A programmable aperture system includes a two dimensional array of mechanical pixels that selectively block light passing through the aperture. An array of linear guiding elements is aligned parallel to one another, and each row of mechanical pixels is supported by a corresponding linear guiding element. Each mechanical pixel is configured to slide along the corresponding linear guiding element when pushed by an actuator subsystem. The actuator subsystem repositions one or more of the mechanical pixel elements to change the shape of the aperture. The actuator subsystem is configured to selectively engage one or more mechanical pixel elements and translate the one or more mechanical pixel elements along corresponding linear guiding elements to a new position.

First claim

What is claimed is:

1. A programmable optical aperture mechanism comprising:
a plurality of linear guiding elements disposed in a first direction;
a plurality of mechanical pixel elements disposed on each of the plurality of linear guiding elements, wherein each of the plurality of mechanical pixel elements is configured to slide along a corresponding linear guiding element, and wherein any number of the plurality of pixel elements is positioned to be exposed to a beam of light passing through an aperture area of the programmable optical aperture mechanism;
an actuator subsystem configured to selectively translate one or more mechanical pixel elements along one or more corresponding linear guiding elements; and
a controller configured to generate command signals communicated to the actuator subsystem to control a rearrangement of position of the one or more mechanical pixel elements.

2. The programmable optical aperture mechanism of claim 1 , wherein the guiding elements are wire elements positioned across the aperture area.

3. The programmable optical aperture mechanism of claim 1 , wherein the guiding elements are extensible structures configured to be programmably positioned across the aperture area.

4. The programmable optical aperture mechanism of claim 1 , wherein each of the mechanical pixel elements includes one or more protrusion features configured to overlap a portion of a first adjacent mechanical pixel element.

5. The programmable optical aperture mechanism of claim 4 , wherein the one or more protrusion features are configured to overlap a portion of the first adjacent mechanical pixel element in a first direction and a portion of a second adjacent mechanical pixel element in a second direction.

6. The programmable optical aperture mechanism of claim 5 , wherein the first direction is perpendicular to the second direction and the first and second directions are perpendicular to a direction of a beam of light passing through the programmable optical aperture mechanism.

7. The programmable optical aperture mechanism of claim 1 , wherein the surface of each of the mechanical pixel elements exposed to a beam of light passing through the programmable optical aperture mechanism is at least 95% reflective.

8. The programmable optical aperture mechanism of claim 1 , wherein the actuator subsystem includes a linear actuator configured to move a frame in a first direction and an array of solenoid actuators mounted to the frame, wherein each of the array of solenoid actuators is configured to move in a second direction and engage at least one mechanical pixel element.

9. The programmable optical aperture mechanism of claim 2 , wherein each of the wire elements includes an optically absorptive surface exposed to a beam of light passing through the programmable optical aperture mechanism.

10. The programmable optical aperture mechanism of claim 2 , wherein each of the wire elements includes a highly reflective surface exposed to a beam of light passing through the programmable optical aperture, wherein the highly reflective surface is oriented such that an amount of light reflected from the surface is directed away from the beam of light.

11. The programmable optical aperture mechanism of claim 2 , wherein each of the wire elements includes a flange structure configured to prevent light from a beam of light passing through the programmable optical aperture from grazing any other surface of the wire element.

12. A method comprising:
engaging a mechanical pixel element disposed on a linear guiding element, wherein the mechanical pixel element is one of a two dimensional array of mechanical pixel elements each disposed on a corresponding linear guiding element of a plurality of linear guiding elements, wherein each of the plurality of mechanical pixel elements is configured to slide along the corresponding linear guiding element; and
translating the mechanical pixel element along the linear guiding element to rearrange a position of one or more mechanical pixel elements disposed on the linear guiding element such that a shape of an optical aperture of an optical inspection system formed by the two dimensional array of mechanical pixel elements is changed.

13. The method of claim 12 , further comprising:
generating command signals communicated to an actuator subsystem to control the engaging and the translating of the mechanical pixel element.

14. The method of claim 12 , wherein the plurality of linear guiding elements is an array of wire elements aligned in parallel and positioned across the optical aperture.

15. The method of claim 14 , wherein each of the wire elements includes a flange structure configured to prevent incoming light from grazing a surface of the wire element.

16. The method of claim 12 , wherein each of the mechanical pixel elements includes one or more protrusion features configured to overlap a portion of an adjacent mechanical pixel element.

17. The programmable optical aperture mechanism of claim 1 , wherein the aperture area of the programmable optical aperture mechanism is positioned in any of an optical illumination path and an optical collection path of an optical inspection system, the optical inspection system including an illumination source configured to generate an amount of illumination light projected to a surface of a specimen, and a detector configured to detect an amount of light collected from the surface of the specimen.

18. The programmable optical aperture mechanism of claim 17 , wherein the optical inspection system is operable in any of a dark field and a bright field imaging mode.

Assignees

• Kla Tencor Corp

Inventors

• Brunner Rudolf

Classifications

• G02B26/02

  for controlling the intensity of light {(G02B26/004 takes precedence)} · CPC title

• G01N21/9501

  Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20) · CPC title

• G01N21/8806 Primary

  Specially adapted optical and illumination features · CPC title