Method of measuring refractive index distribution, method of manufacturing optical element, and measurement apparatus of refractive index distribution

Patent metadata

Field	Value
Publication number	US-9255879-B2
Application number	US-201313923580-A
Country	US
Kind code	B2
Filing date	Jun 21, 2013
Priority date	Jul 9, 2012
Publication date	Feb 9, 2016
Grant date	Feb 9, 2016

Abstract

A method of measuring a refractive index distribution includes steps of setting a plurality of different arrangements by a translation movement in a state where an object is arranged in first and second media having refractive indices different from a refractive index of the object, measuring transmissive wavefront of the object for each of media and each of the plurality of arrangements by reference light entering the object (S 400 ), obtaining wavefront aberration corresponding to a difference between each transmissive wavefront and a reference transmissive wavefront (S 500 ), obtaining refractive index distribution of the object by removing an influence of a shape error of the object using wavefront aberration of two media in which the object is arranged at the same position (S 70 ), and obtaining refractive index distribution information of the object based on a plurality of refractive index distributions corresponding to the plurality of arrangements (S 80 ).

First claim

What is claimed is:

1. A method of measuring a refractive index distribution, the method comprising:
a measurement step of arranging an object in a medium having a refractive index different from a refractive index of the object to measure a transmissive wavefront of the object by introducing reference light into the object, the reference light including rays of different angles and having a light beam diameter larger than an effective diameter of at least one of a light incident surface or a light emitting surface of the object; and
a calculation step of calculating a refractive index distribution of the object using a measurement result of the transmissive wavefront,
wherein the measurement step includes the steps of:
performing a translation movement of the object or an illumination optical system that emits the reference light without rotating the object to dispose the object at different positions relative to the illumination optical system from each other, and
measuring, for each of the different positions, a first transmissive wavefront in a first medium having a first refractive index and a second transmissive wavefront in a second medium having a second refractive index different from the first refractive index, and

wherein the calculation step includes the steps of:
calculating, for each of the different positions, a first wavefront aberration, which is a difference between a measurement result of the first transmissive wavefront and a transmissive wavefront obtained with a reference object having a specific refractive index distribution and the same shape as a shape of the object in the first medium,
calculating, for each of the different positions, a second wavefront aberration, which is a difference between a measurement result of the second transmissive wavefront and a transmissive wavefront obtained with the reference object in the second medium, and
calculating a plurality of refractive index distributions of the object corresponding to the different positions by removing a shape component of the object based on the first wavefront aberration and the second wavefront aberration to calculate the refractive index distribution of the object.

2. The method of measuring the refractive index distribution according to claim 1 , wherein the measurement step performs the translation movement of an object case that contains the object and the medium relative to the illumination optical system.

3. The method of measuring the refractive index distribution according to claim 1 , wherein the measurement step performs the translation movement of the illumination optical system that emits the reference light while the object is fixed.

4. The method of measuring the refractive index distribution according to claim 1 , wherein the refractive index distribution calculated in the calculation step is a refractive index distribution over an entire region of an effective diameter of the object.

5. The method of measuring the refractive index distribution according to claim 1 , wherein the refractive index distribution calculated in the calculation step is a three-dimensional refractive index distribution of the object.

6. A method of measuring a refractive index distribution, the method comprising:
a measurement step of arranging an object in a medium having a refractive index different from a refractive index of the object to measure a transmissive wavefront of the object by introducing reference light into the object, the reference light including rays of different angles and having a light beam diameter larger than an effective diameter of at least one of a light incident surface or a light emitting surface of the object; and
a calculation step of calculating a refractive index distribution of the object using a measurement result of the transmissive wavefront,
wherein the measurement step includes the steps of:
performing a translation movement of the object or an illumination optical system that emits the reference light without rotating the object to dispose the object at different positions relative to the illumination optical system from each other, and
measuring, for each of the different positions, a first transmissive wavefront for a first wavelength and a second transmissive wavefront for a second wavelength different from the first wavelength, and

wherein the calculation step includes the steps of:
calculating, for each of the different positions, a first wavefront aberration, which is a difference between a measurement result of the first transmissive wavefront and a transmissive wavefront for the first wavelength obtained with a reference object having a specific refractive index distribution and the same shape as a shape of the object in the medium,
calculating, for each of the different positions, a second wavefront aberration, which is a difference between a measurement result of the second transmissive wavefront and a transmissive wavefront for the second wavelength obtained with the reference object in the medium, and
calculating a plurality of refractive index distributions of the object corresponding to the different positions by removing a shape component of the object based on the first wavefront aberration and the second wavefront aberration to calculate the refractive index distribution of the object.

7. The method of measuring the refractive index distribution according to claim 6 , wherein the measurement step performs the translation movement of an object case that contains the object and the medium relative to the illumination optical system.

8. The method of measuring the refractive index distribution according to claim 6 , wherein the measurement step performs the translation movement of the illumination optical system that emits the reference light while the object is fixed.

9. The method of measuring the refractive index distribution according to claim 6 , wherein the refractive index distribution calculated in the calculation step is a refractive index distribution over an entire region of an effective diameter of the object.

10. The method of measuring the refractive index distribution according to claim 6 , wherein the refractive index distribution calculated in the calculation step is a three-dimensional refractive index distribution of the object.

11. A method of manufacturing an optical element, the method comprising the steps of:
molding the optical element; and
measuring a refractive index distribution of the optical element to evaluate the molded optical element,
wherein refractive distribution of the optical element is measured by a method comprising:
a measurement step of arranging an object in a medium having a refractive index different from a refractive index of the object to measure a transmissive wavefront of the object by introducing reference light into the object, the reference light including rays of different angles and having a light beam diameter larger than an effective diameter of at least one of a light incident surface or a light emitting surface of the object; and
a calculation step of calculating a refractive index distribution of the object using a measurement result of the transmissive wavefront,
wherein the measurement step includes the steps of:
performing a translation movement of the object or an illumination optical system that emits the reference light without rotating the object to dispose the object at different positions relative to the illumination optical system from each other, and
measuring, for each of the different positions, a first transmissive wavefront in a first medium having a first refractive index and a second transmissive wavefront in a second medium having a second refractive index different f

Assignees

• Canon Kk

Inventors

• Sugimoto Tomohiro

Classifications

• B29D11/00951

  Measuring, controlling or regulating · CPC title

• G01N21/41 Primary

  Refractivity; Phase-affecting properties, e.g. optical path length (G01N21/21 takes precedence) · CPC title

• G01M11/0242

  by measuring geometrical properties or aberrations · CPC title

• G01N21/45

  using interferometric methods; using Schlieren methods · CPC title