Double-ended tuning fork vibrator, physical quantity sensor, and inertial measurement device
US-2024328785-A1 · Oct 3, 2024 · US
US9255802B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9255802-B2 |
| Application number | US-201414582606-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 24, 2014 |
| Priority date | Dec 27, 2013 |
| Publication date | Feb 9, 2016 |
| Grant date | Feb 9, 2016 |
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A resonator element includes a base portion, and a vibrating arm which extends from the base portion and on which a weight portion is provided, and the weight portion includes a first weight portion which is disposed on one main surface of a distal end portion of the vibrating arm, and a second weight portion which is disposed on the distal end side with respect to the first weight portion and has a thickness smaller than that of the first weight portion. The vibrating arm transmits an energy beam, and a laser incidence area where incidence of the energy beam to the inside of the vibrating arm is allowed, is disposed in a position of the other main surface on the opposite side of the vibrating arm overlapped with the second weight portion.
Opening claim text (preview).
What is claimed is: 1. A resonator element comprising: a base portion; and a vibrating arm which extends from the base portion in a plan view and on which a weight portion is provided, the vibrating arm having a distal end portion on the opposite side of the base portion, the distal end porting having first and second surfaces facing in opposite directions, wherein the weight portion includes a first weight portion which is disposed on the first surface of the distal end por…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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