Apparatus, method and computer program product providing radial addressing of nanowires

Patent metadata

Field	Value
Publication number	US-9252214-B2
Application number	US-201414520524-A
Country	US
Kind code	B2
Filing date	Oct 22, 2014
Priority date	Feb 4, 2005
Publication date	Feb 2, 2016
Grant date	Feb 2, 2016

Abstract

Disclosed is a method to construct a device that includes a plurality of nanowires (NWs) each having a core and at least one shell. The method includes providing a plurality of radially encoded NWs where each shell contains one of a plurality of different shell materials; and differentiating individual ones of the NWs from one another by selectively removing or not removing shell material within areas to be electrically coupled to individual ones of a plurality of mesowires (MWs). Also disclosed is a nanowire array that contains radially encoded NWs, and a computer program product useful in forming a nanowire array.

First claim

What is claimed is:

1. An array comprised of a plurality of radially encoded nanowires (NWs) each comprised of a core and at least one shell, wherein at least two radially encoded nanowires of the plurality of radially encoded nanowires have a differing sequence of shells deposited on the core, each shell is comprised of at least one of a plurality of different shell materials, wherein each shell of the plurality of radially encoded NWs is selectively removed within areas electrically coupled to individual ones of a plurality of mesowires (MWs).

2. An array as in claim 1 , where shells are selectively removed by a shell removal process prior to formation of the MWs.

3. An array as in claim 2 , further comprising a logarithmic NW decoder for NWs with one shell and N=a types of shell material implemented with 2┌ log 2 N┐ MWs and N etching operations.

4. An array as in claim 2 , where at least some of the plurality of NWs exhibit a hybrid encoding where the core is axially encoded and a plurality of shells are radially encoded.

5. An array as in claim 4 , comprising a radial decoder that controls a radial NW code using λ R MWs used in conjunction with a λ A -BRC, further comprising a hybrid decoder.

6. An array as in claim 4 , where said hybrid decoder is constructed by
a) using λ A consecutive MWs for axial decoding, where under these MWs all shells are removed from all NWs such that these MWs function as an axial decoder, where the λ A consecutive MWs are used to select hybrid NWs with a given axial encoding by making non-conducting all NWs that do not exhibit a particular binary reflected codeword;
b) using two λ R MWs for radial decoding, where each NW contains a repeated binary reflected codeword such that if a pair of MWs are λ/2−1 regions apart, exactly one lies over a lightly doped core region, and using λ R such pairs in ┌2λ R /λ A ┐ repetitions of the axial code to produce two identical radial decoders and applying the same etching operations to both MWs in a pair; and
c) where one MW in each pair is adjacent to an exposed lightly doped core region, using the two radial decoders simultaneously to simulate a radial decoder, where the two λ R MWs select MWs with a given radial codeword, and where when a radial codeword and an axial codeword are selected simultaneously, only NWs with a particular hybrid codeword remain conducting.

7. An array as in claim 1 , where shells are selectively removed by an etching process prior to formation of the MWs, the etching process using a plurality of sequentially applied etchants, where individual ones of the etchants are selected based on their ability to strongly etch one type of shell material but not strongly etch other types of shell material.

8. An array as in claim 7 , where said shell materials comprise two or more of Cu, Al 2 O 3 , GaSb and InAs, and where said etchants comprise two or more of FeCl 3 , NaOH, C 4 H 4 KNaO 6 +HCl+H 2 0 2 +H 2 0 and C 6 H 8 O 7 +H 2 O 2 .

9. An array as in claim 7 , where two adjacent shells are comprised of two different shell materials.

10. An array as in claim 1 , further comprising a linear NW decoder for N=α(α−1) n−1 NW types containing n shells of a types of shell materials implemented with λ R =N MWs in N etching operations.

11. An array as in claim 7 , where α=|F| shell materials are divided into two disjoint sets of size α 1 and α 2 , α 1 +α 2 =α, where the shell materials used to form the ith shell of each radial encoding is chosen from the first set when i is odd, and from the second set when i is even enabling N=α 1 ┌ n/2 ┐ α 2 └ n/2 ┘ possible NW radial encodings.

12. An array as in claim 11 , where σ i denotes those shell materials that can appear in the ith shell, where σ i depends on the parity of i, where M is an arbitrary set of shell materials, where W represents a particular MW, and where, when no previous etching has been performed, [Etch(σ n , W), Etch(σ n−1 , W), . . . , Etch(σ s+1 , W)] removes the outermost n-s shells of every NW in a region under W, Etch(M, W) removes a shell from only NWs with a material in M in their sth shell, and [Etch(σ s−1 , W), . . . , Etch(σ 1 , W)] exposes the cores of the NWs.

13. An array as in claim 7 further comprising a FullyLog decoder for n-shell NWs having α 1 (α 2 ) materials in odd-(even-)indexed shells and N=α 1 ┌ n/2 ┐ α 2 └ n/2 ┘ NW types is implemented with M FullyLog =2(┌n/2┐┌ log 2 α 1 ┐+└n/2┘┌ log 2 α 2 ┐) MWs, and
E=┌n/ 2 ┐α 1 +└n/2┘α 2 etching operations, where when α 1 =α 2 =α/2 and n is even, N=(α/2) n , M FullyLog =2┌ log 2 N┐, and E=log 2 N.

14. An array as in claim 7 , further comprising a LinearLog decoder for n-shell NWs having α 1 (α 2 ) materials in odd-(even-)indexed shells and N=α 1 ┌ n/2 ┐ α 2 └ n/2 ┘ NW types is implemented with MWs, and M LinearLog =┌n/2┌α 1 +└n/2┘α 2 MWs, and
E=┌n/2┘α 1 +└/2┘α 2 etching operations, where when α 1 =α 2 =α/2 and n is even, N=(α/2) n , M LinearLog =n α/2, and E=log 2 N.

15. An array as in claim 7 , where the etching process is a two-stage etching process, where when the array is first etched, a resultant first decoder is used to discover which codewords are present at each ohmic contact (OC), and where if each OC has at least C codewords, regions under a second set of C MWs are etched to form a second decoder.

16. An array as in claim 15 , where at each MW, at each OC, the two-stage etching process is conducted using an etching process that exposes one of C shell material type sequences known to be present such that each of C MWs controls at least one particular NW at each OC.

17. An array as in claim 15 , where S is a set of shell material sequences present at a particular OC, where there are C sequences in S such that each sequence contains a shell material type in some shell that no other sequence in S contains in that shell, and when this condition is met, C arbitrary codewords are deterministically assignable.

18. An array as in claim 1 , where each core is surrounded by an insulating shell comprised of a dielectric material, the insulating shell being disposed between the core and the at least one shell.

19. An array as in claim 1 , where each core is axially doped.

20. An array as in claim 1 , where a size of a codespace C R is in a range of about 2≦C R ≦x.

21. An array as in claim 1 , where a size of a codespace C R is in a range of about 10≦C R ≦30.

22. An array as in claim 1 , comprising part of a digital data storage memory.

23. An array as in claim 1 , comprising part of a programmable logic array.

24. An array as in claim 1 , where the shell material is comprised of a non-organic material.

25. An array as in claim 1 , where the shell material is comprised of an organic material.

Assignees

• Univ Brown Res Found
• Univ Brown

Inventors

• Dehon Andre
• Lieber Charles M
• Savage John E
• Rachlin Eric

Classifications

• H10D62/119

  Nanowire, nanosheet or nanotube semiconductor bodies · CPC title

• H10D62/121

  oriented parallel to substrates · CPC title

• H10D84/00 Primary

  Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers · CPC title

• H01L51/10

  Electricity · mapped topic

• H01L29/0669 Primary

  Electricity · mapped topic