Surface roughness measuring unit and coordinate measuring apparatus

Patent metadata

Field	Value
Publication number	US-9250053-B2
Application number	US-201314050553-A
Country	US
Kind code	B2
Filing date	Oct 10, 2013
Priority date	Oct 18, 2012
Publication date	Feb 2, 2016
Grant date	Feb 2, 2016

Abstract

A surface roughness measuring unit according to the present invention includes a contact pin unit having a contact pin and a displacement detector, the contact pin being provided so as to project and retract through a through-hole of a skid and scanning and moving along a surface of a work piece, the displacement detector detecting displacement of the contact pin in a direction perpendicular to the work piece surface; a driver moving the contact pin unit forward and backward along the surface of the work piece; and a joint coupling the contact pin unit and the driver to a measurement head holder of a coordinate measuring system. The surface roughness measuring unit further includes a contact detector that detects contact of the skid on the surface of the work piece.

First claim

What is claimed is:

1. A surface roughness measuring unit comprising:
a contact pin unit comprising:
a contact pin configured to project and retract through a through-hole of a skid during a scanning motion along a surface of a work piece; and
a displacement detector configured to detect displacement of the contact pin in a direction perpendicular to the work piece surface;

a driver configured to move the contact pin unit forward and backward along the work piece surface;
a joint configured to couple the contact pin unit and the driver to a measurement head holder of a coordinate measuring device; and
a contact detector configured to detect contact of the skid on the work piece surface, the contact detector comprising:
a first sensor provided to one of the contact pin unit and the driver; and
a second sensor provided to the other of the contact pin unit and driver in a position opposite the first sensor, wherein the first sensor is configured to detect one of proximity and contact to the second sensor.

2. The surface roughness measuring unit according to claim 1 , wherein, when the skid makes contact with the work piece surface, the contact detector detects displacement of the contact pin unit relative to the driver in the direction perpendicular to the work piece surface.

3. The surface roughness measuring unit according to claim 2 , wherein:
the driver comprises a frame configured to move forward and backward along a guiding shaft via power from a motor, when the frame is being guided by the guiding shaft.

4. The surface roughness measuring unit according to claim 3 , wherein the first sensor is a photosensor and the second sensor is a shield plate insertably and withdrawably provided between a light emitter and a light receiver of the photosensor.

5. The surface roughness measuring unit according to claim 1 , further comprising a biaser configured to bias the contact pin unit in a first direction defined as a direction in which the contact pin emerges from the through-hole of the skid.

6. The surface roughness measuring unit according to claim 5 , wherein:
the driver comprises a frame configured to move forward and backward; and
the contact pin unit is cantilevered on the frame by a coupler.

7. The surface roughness measuring unit according to claim 6 , wherein the coupler is a plate spring configured to bias the contact pin unit in the first direction.

8. The surface roughness measuring unit according to claim 1 , further comprising:
a receiver fixedly mounted to a housing; and
a supporter configured to be received by and separated from the receiver, wherein:
the driver is fixedly connected to the supporter,
the supporter is biased in the first direction by a second biaser configured to be received by the receiver, and
the driver is separated from the receiver when the driver receives force from a direction opposite the first direction, the first direction defined as the direction in which the contact pin emerges from the through-hole of the skid.

9. The surface roughness measuring unit according to claim 8 , further comprising a sensor configured to that detect one of a state in which the supporter is received by the receiver and a state in which the supporter is separated from the receiver.

10. A coordinate measuring apparatus comprising:
the surface roughness measuring unit according to claim 1 ; and
a coordinate measuring device to which the surface roughness measuring unit is connected as a measurement head.

11. A coordinate measuring apparatus comprising:
the surface roughness measuring unit according to claim 2 ; and
a coordinate measuring device to which the surface roughness measuring unit is connected as a measurement head.

12. A coordinate measuring apparatus comprising:
the surface roughness measuring unit according to claim 3 ; and
a coordinate measuring device to which the surface roughness measuring unit is connected as a measurement head.

13. A coordinate measuring apparatus comprising:
the surface roughness measuring unit according to claim 4 ; and
a coordinate measuring device to which the surface roughness measuring unit is connected as a measurement head.

14. A coordinate measuring apparatus comprising:
the surface roughness measuring unit according to claim 5 ; and
a coordinate measuring device to which the surface roughness measuring unit is connected as a measurement head.

15. A coordinate measuring apparatus comprising:
the surface roughness measuring unit according to claim 6 ; and
a coordinate measuring device to which the surface roughness measuring unit is connected as a measurement head.

16. A coordinate measuring apparatus comprising:
the surface roughness measuring unit according to claim 7 ; and
a coordinate measuring device to which the surface roughness measuring unit is connected as a measurement head.

17. A coordinate measuring apparatus comprising:
the surface roughness measuring unit according to claim 8 ; and
a coordinate measuring device to which the surface roughness measuring unit is connected as a measurement head.

18. A coordinate measuring apparatus comprising:
the surface roughness measuring unit according to claim 9 ; and
a coordinate measuring device to which the surface roughness measuring unit is connected as a measurement head.

Assignees

• Mitutoyo Corp

Inventors

• Hirano Kotaro
• Hama Nobuyuki
• Arai Masanori
• Matsumiya Sadayuki

Classifications

• G01B5/008

  using coordinate measuring machines · CPC title

• G01B5/016 Primary

  Constructional details of contacts · CPC title

• G01B7/023

  for measuring distance between sensor and object (G01B7/082 and G01B7/102 take precedence) · CPC title

• B82Y35/00

  Methods or apparatus for measurement or analysis of nanostructures · CPC title

• G01B5/012 Primary

  Contact-making feeler heads therefor · CPC title