Waveguide-based apparatus for exciting and sustaining a plasma

Patent metadata

Field	Value
Publication number	US-9247629-B2
Application number	US-201313838474-A
Country	US
Kind code	B2
Filing date	Mar 15, 2013
Priority date	Mar 15, 2013
Publication date	Jan 26, 2016
Grant date	Jan 26, 2016

Abstract

An apparatus includes an electromagnetic waveguide; an iris structure providing an iris in the waveguide. The iris structure may define an iris hole, a first iris slot at a first side of the iris hole, and a second iris slot at a second side of the iris hole. A plasma torch is disposed within the iris hole. An electric field in the waveguide changes direction from the first iris slot to the second iris slot. The plasma torch generates a plasma which is substantially symmetrical around a longitudinal axis of the plasma torch, such that the plasma may have a substantially toroidal shape. In some embodiments, a dielectric material is disposed in the iris hole, outside of the plasma torch. In some embodiments, the height of at least one of the iris slots is greater at the ends thereof than in the middle.

First claim

What is claimed is:

1. An apparatus, comprising:
an electromagnetic waveguide;
an iris structure providing an iris in the electromagnetic waveguide, the iris structure defining an iris hole, a first iris slot at a first side of the iris hole, and a second iris slot at a second side of the iris hole;
a plasma torch disposed within the iris hole and comprising an outermost surface, wherein a gap is defined in the iris hole between the outermost surface and the iris structure; and
a dielectric material disposed in the gap, outside of the plasma torch.

2. The apparatus of claim 1 , wherein the dielectric material comprises a dielectric sleeve, wherein the plasma torch is disposed inside the dielectric sleeve.

3. The apparatus of claim 1 , wherein the dielectric material comprises a cylindrical dielectric sleeve.

4. The apparatus of claim 1 , wherein the dielectric material is alumina.

5. The apparatus of claim 1 , wherein the dielectric material has a dielectric constant of at least 2.

6. The apparatus of claim 1 , wherein the dielectric material has a dielectric constant of at least 7.

7. An apparatus, comprising:
an electromagnetic waveguide;
an iris structure providing an iris in the electromagnetic waveguide, the iris structure defining an iris hole, a first iris slot at a first side of the iris hole, and a second iris slot at a second side of the iris hole; and
a plasma torch disposed within the iris hole,
wherein a height of at least one of the iris slots is greater at ends thereof than in a middle thereof.

8. The apparatus of claim 7 , wherein the height of each of the iris slots is greater at the ends thereof than in the middle thereof.

9. The apparatus of claim 7 , wherein at least one of the iris slots includes:
a first end section having a first height;
a second end section having a second height; and
a central portion disposed between the first end section and the second end section, wherein the central portion has a third height,
wherein the third height is less than the first height and the second height.

10. The apparatus of claim 9 , wherein the first end section has a first width, the second end section has a second height, and the central portion has a third width, wherein the first width is the same as the second width.

11. The apparatus of claim 9 , further comprising a dielectric material disposed in the iris hole outside of the plasma torch.

12. The apparatus of claim 9 , wherein the apparatus is configured to generate a plasma in the iris hole, and wherein the plasma is substantially symmetrical around a longitudinal axis of the plasma torch.

13. The apparatus of claim 12 , wherein the plasma has a substantially toroidal shape.

14. The apparatus of any claim 9 , wherein, in operation, an axial magnetic field is established extending along a longitudinal axis of the plasma torch.

15. An apparatus, comprising:
an electromagnetic waveguide;
an iris structure providing an iris in the electromagnetic waveguide, the iris structure defining an iris hole, a first iris slot at a first side of the iris hole, and a second iris slot at a second side of the iris hole; and

a plasma torch disposed within the iris hole,
wherein, in operation, an electric field in the waveguide changes direction from the first iris slot to the second iris slot.

16. The apparatus of claim 15 , wherein the electric field at the second iris slot is in an opposite direction from the electric field at the first iris slot.

17. The apparatus of claim 15 , further comprising a dielectric material disposed in the iris hole outside of the plasma torch.

18. The apparatus of claim 15 , wherein the height of at least one of the iris slots is greater at ends thereof than in a middle thereof.

19. The apparatus of claim 15 , wherein the apparatus is configured to generate a plasma in the iris hole, and wherein the plasma is substantially symmetrical around a longitudinal axis of the plasma torch.

20. The apparatus of claim 19 , wherein the plasma has a substantially toroidal shape.

Assignees

• Agilent Technologies Inc

Inventors

• Vahidpour Mehrnoosh
• Owen Geraint

Classifications

• H05H1/30 Primary

  using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/28 takes precedence) · CPC title

• H05H1/26 Primary

  Plasma torches · CPC title

• H05H2001/4622

  Electricity · mapped topic

• H05H1/46

  using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/26 takes precedence) · CPC title

• H05H1/4622

  using waveguides · CPC title