Composition for hardmask, method of forming patterns using the same, and semiconductor integrated circuit device including the patterns

Patent metadata

Field	Value
Publication number	US-9244351-B2
Application number	US-201214368858-A
Country	US
Kind code	B2
Filing date	Nov 23, 2012
Priority date	Dec 30, 2011
Publication date	Jan 26, 2016
Grant date	Jan 26, 2016

Abstract

A composition for a hardmask including copolymer including repeating units represented by Chemical Formulae 1 and 2 and a solvent, a method of forming a pattern using the same, and a semiconductor integrated circuit device including a pattern formed using the method are provided.

First claim

The invention claimed is:

1. A composition for a hardmask, the composition comprising:
a copolymer including repeating units represented by the following Chemical Formulae 1 and 2; and
a solvent:

wherein, in Chemical Formulae 1 and 2,
R 1 is a substituted or unsubstituted C1 to C20 alkylene group, a substituted or unsubstituted C2 to C20 alkenylene group, a substituted or unsubstituted C2 to C20 alkynylene group, or a substituted or unsubstituted C6 to C30 arylene group,
R 2 to R 4 , R 5 to R 14 , R 18 , and R 19 are each independently hydrogen, a hydroxyl group, an amino group, a thiol group, a substituted or unsubstituted C1 to C20 alkyl group, a substituted or unsubstituted C2 to C20 alkenyl group, a substituted or unsubstituted C2 to C20 alkynyl group, a substituted or unsubstituted C1 to C20 alkoxy group, a substituted or unsubstituted C3 to C20 cycloalkyl group, a substituted or unsubstituted C3 to C20 cycloalkenyl group, a substituted or unsubstituted C3 to C20 cycloalkynyl group, a substituted or unsubstituted C2 to C20 heterocycloalkyl group, a substituted or unsubstituted C2 to C20 heterocycloalkenyl group, a substituted or unsubstituted C2 to C20 heterocycloalkynyl group, or a substituted or unsubstituted C6 to C30 aryl group, provided that at least one of R 5 to R 14 is a hydroxyl group, an amino group, or a thiol group, and R 18 and R 19 include at least one hydroxyl group, respectively,
R 15 and R 16 are each independently a substituted or unsubstituted C6 to C30 arylene group,
R 20 to R 25 are each independently a substituted or unsubstituted C1 to C20 alkylene group, a substituted or unsubstituted C2 to C20 alkenylene group, a substituted or unsubstituted C2 to C20 alkynylene group, or a substituted or unsubstituted C6 to C30 arylene group,
n 2 to n 4 are each independently integers that satisfy the following relations: 0≦n 2 ≦2, 0≦n 3 ≦3 and 0≦n 4 ≦4,
n 5 and n 6 are each independently integers ranging from 1 to 10,
n 7 to n 10 are each independently integers ranging from 0 to 10,
x and y are each independently integers that satisfy the following relations: x+y=1, 0≦x≦1, and 0≦y≦1,
n and m are each independently integers ranging from 1 to 200, and
to * 4 are binding sites to another repeating unit or terminal group.

2. The composition for a hardmask as claimed in claim 1 , wherein, in Chemical Formula 2, R 15 and R 16 are each independently a phenylene group, a naphthylene group, or a C1 to C20 alkoxy phenylene group.

3. The composition for a hardmask as claimed in claim 1 , wherein, in Chemical Formula 2, R 20 to R 25 are each independently a substituted or unsubstituted C1 to C20 alkylene group or substituted or unsubstituted C6 to C30 arylene group, and
n 7 to n 10 are each independently integers of 0 to 5.

4. The composition for a hardmask as claimed in claim 1 , wherein, in Chemical Formulae 1 and 2, n and m are each independently integers of 1 to 100.

5. The composition for a hardmask as claimed in claim 1 , wherein, in Chemical Formulae 1 and 2, a ratio of m/n is 0.01 to 20.

6. The composition for a hardmask as claimed in claim 1 , wherein the copolymer includes at least one selected from a structural unit represented by the following Chemical Formula 3-1, a structural unit represented by the following Chemical Formula 3-2, a structural unit represented by the following Chemical Formula 3- 3, a structural unit represented by the following Chemical Formula 3-4, and a structural unit represented by the following Chemical Formula 3-5:

wherein, in Chemical Formulae 3-1 to 3-5,
x and y are each independently integers that satisfy the following relations: x+y=1, 0≦x≦1,0≦y≦1,
n and m are each independently integers ranging from 1 to 200, and
* 1 to * 4 are the same as those defined with respect to Chemical Formulae 1 and 2.

7. The composition for a hardmask as claimed in claim 1 , wherein the copolymer has a weight average molecular weight of 1,000 to 1,000,000 g/mol.

8. The composition for a hardmask as claimed in claim 1 , wherein the copolymer is included in an amount of 1 wt % to 50 wt % based on the total amount of the composition for a hardmask.

9. A method of forming a pattern, the method comprising:
providing a material layer on a substrate;
applying the composition for a hardmask of claim 1 on the material layer to form a hardmask layer;
forming a silicon-containing thin layer on the hardmask layer;
forming a photoresist layer on the silicon-containing thin layer;
exposing and developing the photoresist layer to form a photoresist pattern;
selectively removing the silicon-containing thin layer and hardmask layer using the photoresist pattern to expose a part of the material layer; and
etching an exposed part of the material layer.

10. The method of forming a pattern as claimed in claim 9 , wherein applying the composition for a hardmask on the material layer includes performing a spin-on coating method.

11. The method of forming a pattern as claimed in claim 9 , further comprising forming a bottom anti-reflection coating (BARC) on the silicon-containing thin layer after forming the silicon-containing thin layer.

12. The method of forming a pattern as claimed in claim 9 , further comprising heat treating the composition for a hardmask after applying the composition on the material layer such that the composition is heat-treated at 100° C. to 300° C.

Assignees

• Lee Sung-Jae
• Moon Joon-Young
• Cho Youn-Jin
• Kim Young-Min
• Yoon Yong-Woon
• Cheil Ind Inc

Inventors

• Lee Sung-Jae
• Moon Joon-Young
• Cho Youn-Jin
• Kim Young-Min
• Yoon Yong-Woon

Classifications

• H10P76/405

  characterised by their composition, e.g. multilayer masks · CPC title

• H10P76/2043

  using an anti-reflective coating · CPC title

• G03F7/26

  Processing photosensitive materials; Apparatus therefor (G03F7/12 - G03F7/24 take precedence) · CPC title

• G03F7/004

  Photosensitive materials (G03F7/12, G03F7/14 take precedence) · CPC title

• G03F7/094 Primary

  Multilayer resist systems, e.g. planarising layers · CPC title