Micro movable device and optical switching apparatus

Patent metadata

Field	Value
Publication number	US-9244269-B2
Application number	US-57339309-A
Country	US
Kind code	B2
Filing date	Oct 5, 2009
Priority date	Oct 10, 2008
Publication date	Jan 26, 2016
Grant date	Jan 26, 2016

Abstract

A micro movable device includes: a micro movable substrate in which a micro movable unit is formed, the micro movable unit including a frame, a movable part, and a coupling part for coupling the frame and the movable part to define an axial center of rotation of the movable part; a supporting substrate; and a reinforced fixed part provided between the frame and the supporting substrate, and including a first spacer that joins the frame to the supporting substrate and an adhesive part that covers the first spacer and joins the frame to the supporting substrate, wherein the frame includes a first area facing the movable part in a direction of extent of the axial center, and a second area different from the first area, and the reinforced fixed part is bonded to the second area of the frame.

First claim

What is claimed is:

1. A micro movable device comprising:
a micro movable substrate in which a micro movable unit is formed, the micro movable unit including a frame, a movable part, and a coupling part for coupling the frame and the movable part to define an axial center of rotation of the movable part;
a supporting substrate; and
a reinforced fixed part provided between the frame and the supporting substrate, and including a first spacer that joins the frame to the supporting substrate and an adhesive part that covers the first spacer and joins the frame to the supporting substrate, wherein the adhesive part substantially covers the first spacer, and wherein
the frame includes a first area facing the movable part in a direction of extent of the axial center and a second area different from the first area, and
the reinforced fixed part is bonded to the second area of the frame.

2. A micro movable device comprising:
a micro movable substrate in which a plurality of micro movable units are formed, each micro movable unit including a frame, a movable part, and a coupling part for coupling the frame and the movable part to define an axial center of rotation of the movable part, the frames of the plurality of micro movable units forming a common frame;
a supporting substrate; and
a reinforced fixed part provided between the common frame and the supporting substrate, and including a spacer part that joins the common frame to the supporting substrate and an adhesive part that covers the spacer part and joins the common frame to the supporting substrate, wherein the adhesive part substantially covers the spacer part, and wherein
the plurality of micro movable units are arranged in a line so that the axial centers of the plurality of micro movable units run parallel to each other;
the common frame includes a first area facing the movable part in a direction of extent of the axial centers, and a second area different from the first area, and
the reinforced fixed part is bonded to the second area of the common frame.

3. The micro movable device according to claim 2 , wherein
the second area includes a pair of outermost areas, the plurality of micro movable units are arranged between the pair of outermost areas, and
the reinforced fixed part is bonded to at least one of the outermost areas.

4. The micro movable device according to claim 2 , wherein the axial centers of the plurality of micro movable units are parallel to one another.

5. The micro movable device according to claim 1 , wherein
the supporting substrate is a wiring substrate, and
the first spacer electrically connects the wiring substrate and the micro movable substrate.

6. The micro movable device according to claim 1 , further comprising: a second spacer provided between the frame and the supporting substrate to join the frame to the supporting substrate.

7. The micro movable device according to claim 6 , wherein the supporting substrate is a wiring substrate, and
the second spacer electrically connects the wiring substrate and the micro movable substrate.

8. The micro movable device according to claim 6 , wherein at least one of the first spacer and the second spacer is a bump part including a plurality of bumps stacked on each other.

9. The micro movable device according to claim 8 , wherein
the bump part is bonded to the micro movable substrate via a conductive adhesive.

10. The micro movable device according to claim 1 , wherein the micro movable substrate and the supporting substrate are made of silicon.

11. The micro movable device according to claim 1 , wherein the micro movable unit further includes a drive mechanism configured to cause the movable part to be rotationally displaced.

12. The micro movable device according to claim 1 , wherein the movable part includes a movable frame, a movable body, and a coupling part for coupling the movable frame and the movable body.

13. An optical switching apparatus including a plurality of micro mirror devices, each micro mirror device comprising:
a micro movable substrate in which a micro movable unit is formed, the micro movable unit including a frame, a movable part on which a mirror is formed, and a coupling part for coupling the frame and the movable part to define an axial center of rotation of the movable part;
a supporting substrate; and
a reinforced fixed part provided between the frame and the supporting substrate, and including a spacer part that joins the frame to the supporting substrate and an adhesive part that covers the spacer part and joins the frame to the supporting substrate; wherein the adhesive part substantially covers the spacer part; and wherein
the frame includes a first area facing the movable part in a direction of extent of the axial center, and a second area different from the first area, and the reinforced fixed part is bonded to the second area of the frame.

Assignees

• Soneda Hiromitsu
• Matsumoto Tsuyoshi
• Mizuno Yoshihiro
• Kouma Norinao
• Okuda Hisao
• Tsuboi Osamu
• Drnc Holdings Inc

Inventors

• Soneda Hiromitsu
• Matsumoto Tsuyoshi
• Mizuno Yoshihiro
• Kouma Norinao
• Okuda Hisao
• Tsuboi Osamu

Classifications

• B81B2203/058

  Rotation out of a plane parallel to the substrate · CPC title

• G02B6/3518

  the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device (MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833) · CPC title

• G01D5/285

  using a movable mirror · CPC title

• G02B6/3556

  NxM switch, i.e. regular arrays of switches elements of matrix type constellation · CPC title

• G02B6/3584

  constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching (MEMS per se B81B, B81C) · CPC title