Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter
US-9195152-B2 · Nov 24, 2015 · US
US9241679B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9241679-B2 |
| Application number | US-201313927633-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 26, 2013 |
| Priority date | Jun 26, 2012 |
| Publication date | Jan 26, 2016 |
| Grant date | Jan 26, 2016 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A method and an apparatus for filtering radio-frequency electromagnetic beams, in particular x-rays, include a fluid container containing a ferrofluid which at least partially absorbs the electromagnetic beams. A distribution of the ferrofluid within the fluid container can be varied by using an applied magnetic gradient field. An irradiation apparatus and a device for irradiating an object are also provided.
Opening claim text (preview).
The invention claimed is: 1. A filter apparatus for filtering X-ray radiation, the filter apparatus comprising: a fluid container; and a ferrofluid disposed in said fluid container; and at least one magnet for applying a magnetic gradient field to said ferrofluid; said ferrofluid configured to at least partially absorb the X-ray radiation; and said ferrofluid having a distribution within said fluid container being laterally variable in a first lateral direction and in a second lateral direction with respect to a direction of the X-ray radiation by the magnetic gradient field applied by said at least one magnet, wherein the second lateral direction is orthogonal to the first lateral direction. 2. The filter apparatus according to claim 1 , wherein said ferrofluid has ferromagnetic nanoparticles contained in a carrier medium. 3. The filter apparatus according to claim 1 , wherein said carrier medium is oil. 4. The filter apparatus according to claim 2 , which further comprises a transparent liquid disposed in said fluid container in addition to said ferrofluid, said transparent liquid being immiscible with said carrier medium of said ferrofluid. 5. The filter apparatus according to claim 4 , wherein said transparent liquid is water or alcohol. 6. The filter apparatus according to claim 1 , which further comprises magnets disposed around said fluid container and configured to generate the magnetic gradient field. 7. The filter apparatus according to claim 6 , wherein said magnets are switchable electromagnets having at least one of: an individually adjustable generated field strength or a variable distance from said fluid container. 8. The filter apparatus according to claim 6 , wherein said magnets are permanent magnets disposed at a variable distance from said fluid container. 9. The filter apparatus according to claim 1 , wherein said ferrofluid disposed in said fluid container has a filter property being adjustable with respect to an absorption of the X-ray radiation. 10. The filter apparatus according to claim 9 , wherein said filter property of said ferrofluid contained in said fluid container is adjustable with respect to the absorption of the X-ray radiation by: selecting magnetic nanoparticles or a mixture of different magnetic nanoparticles; or admixing nonmagnetic particles into the ferrofluid; or changing a percentage by volume of magnetic and nonmagnetic particles in said ferrofluid and varying a volume of said ferrofluid contained in said fluid container. 11. An irradiation apparatus for irradiating an object with X-ray radiation, the irradiation apparatus comprising: a radiation source for generating the X-ray radiation; and a filter apparatus according to claim 1 . 12. An irradiation device for irradiating an object with X-ray radiation, the irradiation device comprising: an irradiation apparatus including a radiation source for generating the X-ray radiation and a filter apparatus according to claim 1 ; a patient receiving compartment for accommodating a patient as an object; and a radiation detector disposed in said patient receiving compartment and configured to register the X-ray radiation passing through the patient. 13. The irradiation device according to claim 12 , wherein said irradiation apparatus is rotatable around said patient receiving compartment. 14. The irradiation device according to claim 12 , wherein said radiation detector has a camera or an exposable film. 15. The irradiation device according to claim 12 , wherein said fluid container has a bow-tie geometry. 16. The irradiation device according to claim 12 , wherein said distribution of said ferrofluid contained within said fluid container is variable relative to a projection axis of the irradiation device by using the applied magnetic gradient field. 17. The irradiation device according to claim 12 , wherein said distribution of said ferrofluid within said fluid container is adjusted as a function of a detected position of the patient disposed in said patient receiving compartment. 18. A method for filtering X-ray radiation, the method comprising: obtaining a ferrofluid that at least partially absorbs X-ray radiation; and applying a magnetic gradient field to laterally displace a distribution of the ferrofluid in a first lateral direction and in a lateral second direction with respect to a direction of X-ray radiation, wherein the second lateral direction is orthogonal to the first lateral direction. 19. The filter apparatus according to claim 1 , wherein said at least one magnet is selected from the group consisting of a plurality of magnets annularly surrounding said fluid container and four magnets surrounding said fluid container.
Transmission computed tomography [CT] · CPC title
involving control of exposure · CPC title
with beam-forming means · CPC title
the source being combined with a filter or grating · CPC title
Diaphragms · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.