System and method for controlling droplet timing in an LPP EUV light source

Patent metadata

Field	Value
Publication number	US-9241395-B2
Application number	US-201314037817-A
Country	US
Kind code	B2
Filing date	Sep 26, 2013
Priority date	Sep 26, 2013
Publication date	Jan 19, 2016
Grant date	Jan 19, 2016

Abstract

A method and apparatus for improved control of the trajectory and timing of droplets of target material in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system is disclosed. A droplet illumination module generates two laser curtains for detecting the droplets. The first curtain is used for detecting the position of the droplets relative to a desired trajectory to the irradiation site so that the position of a droplet generator may be adjusted to direct the droplets to the irradiation site, as in the prior art. A droplet detection module detects each droplet as it passes through the second curtain, determines when the source laser should generate a pulse so that the pulse arrives at the irradiation site at the same time as the droplet, and sends a signal to the source laser to fire at the correct time.

First claim

What is claimed is:

1. A system for timing firing of a source laser in an EUV LPP light source having a droplet generator which releases a droplet at a predetermined speed, the source laser firing pulses at an irradiation site, comprising:
a droplet illumination module comprising a first line laser for generating a first laser curtain between the droplet generator and the irradiation site;
a droplet detection module comprising a first sensor for detecting a flash from the first laser curtain when a droplet passes through the first laser curtain; and
a first controller for determining, based upon the flash from the first laser curtain, the distance from the first curtain to the irradiation site, and the speed of the droplet, when the source laser should fire a pulse so as to irradiate the droplet when the droplet reaches the irradiation site, and generating a timing signal instructing the source laser to fire at such time.

2. The system of claim 1 , wherein:
the droplet illumination module further comprises a second line laser for generating a second laser curtain between the droplet generator and the irradiation site; and
the system further comprises:
a second sensor for detecting a flash from the second laser curtain when the droplet passes through the second laser curtain; and
a second controller for determining, from the flash from the second laser curtain, whether the droplet is on a desired trajectory leading to the irradiation site and adjusting the position of the droplet generator as necessary so that the droplet is on the desired trajectory.

3. The system of claim 1 wherein the droplet illumination module further comprises a viewport between the first line laser and the desired trajectory of the droplet.

4. The system of claim 3 wherein the droplet illumination module further comprises a port protection aperture for protecting the viewport.

5. The system of claim 4 wherein the port protection aperture comprises a plurality of separated metallic elements.

6. The system of claim 1 wherein the droplet detection module further comprises a collection lens for collecting light from the flash from the first laser curtain and focusing the light onto the first sensor.

7. The system of claim 6 wherein the droplet detection module further comprises a slit aperture between the collection lens and the first sensor.

8. The system of claim 1 wherein the droplet detection module further comprises a port protection aperture for protecting the first sensor.

9. The system of claim 8 wherein the port protection aperture comprises a plurality of separated metallic elements.

10. The system of claim 2 wherein the first laser curtain is located closer to the irradiation site than the second laser curtain.

11. The system of claim 10 wherein the shortest distance from the first laser curtain to the irradiation site is approximately 5 mm and the shortest distance from the second laser curtain to the irradiation site is approximately 10 mm.

12. A method for timing firing of a source laser in an EUV LPP light source having a droplet generator which releases a droplet at a predetermined speed, the source laser firing pulses at an irradiation site, comprising:
generating a first laser curtain, between the droplet generator and the irradiation site;
detecting a flash from the first laser curtain when a droplet passes through the first laser curtain; and
determining, based upon the flash from the first laser curtain, the distance from the first curtain to the irradiation site, and the speed of the droplet, when the source laser should fire a pulse so as to irradiate the droplet when the droplet reaches the irradiation site, and generating a timing signal instructing the source laser to fire at such time.

13. The method of claim 12 , further comprising:
generating a second laser curtain between the droplet generator and the irradiation site;
detecting a flash from the second laser curtain when the droplet passes through the second laser curtain; and
determining, from the flash from the second laser curtain, whether the droplet is on a desired trajectory leading to the irradiation site and adjusting the position of the droplet generator as necessary so that the droplet is on the desired trajectory.

14. A non-transitory computer readable storage medium having embodied thereon instructions for causing a computing device to execute a method for timing firing of a source laser in an EUV LPP light source having a droplet generator for sequentially generating droplets of target material, the source laser firing pulses at an irradiation site to irradiate the droplets so as to create a plasma, the method comprising:
generating a first laser curtain, between the droplet generator and the irradiation site;
detecting a flash from the first laser curtain when a droplet passes through the first laser curtain; and
determining, based upon the flash from the first laser curtain, the distance from the first curtain to the irradiation site, and the speed of the droplet, when the source laser should fire a pulse so as to irradiate the droplet when the droplet reaches the irradiation site, and generating a timing signal instructing the source laser to fire at such time.

Assignees

• Asml Netherlands Bv

Inventors

• Senekerimyan Vahan
• Wehrens Martijn

Classifications

• H05G2/0084

  Control of the laser beam · CPC title

• H05G2/0027 Primary

  Arrangements for controlling the supply; Arrangements for measurements · CPC title

• H05G2/008 Primary

  involving an energy-carrying beam in the process of plasma generation · CPC title

• H05G2/006

  Electricity · mapped topic