Semiconductor device, method for manufacturing same, and display device
US-8999823-B2 · Apr 7, 2015 · US
US9239484B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9239484-B2 |
| Application number | US-201113884356-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 2, 2011 |
| Priority date | Nov 10, 2010 |
| Publication date | Jan 19, 2016 |
| Grant date | Jan 19, 2016 |
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A thin film transistor substrate ( 20 a ) includes an insulating substrate ( 10 a ), a semiconductor layer ( 13 a ) provided on the insulating substrate ( 10 a ) and having a channel region (C), and a channel protection layer ( 25 ) provided in the channel region (C). The channel protection layer ( 25 ) is made of a multilayer film in which first insulating films and second insulating films are alternately layered. A relationship between a refractive index Ra of the first insulating film and a refractive index Rb of the second insulating film is Rb/Ra≧1.3.
Opening claim text (preview).
The invention claimed is: 1. A display device substrate, comprising: an insulating substrate; a gate electrode provided directly on the insulation substrate; a gate insulating film provided directly on the insulating substrate and the gate electrode; a semiconductor layer provided on the insulating substrate, directly provided on the gate insulating film, and including a channel region; and a channel protection layer provided in the channel region and made of an insulating material, wherein a fine projection/recess structure including recesses and projections is defined in a surface of the channel protection layer which faces away from the semiconductor layer. 2. The display device substrate of claim 1 , wherein a distance between adjacent ones of the projections or adjacent ones of the recesses of the projection/recess structure is 380 nm or less. 3. The display device substrate of claim 1 , wherein a height of the projection or a depth of the recess is 760 nm or more. 4. The display device substrate of claim 1 , wherein the semiconductor layer is a semiconductor layer of a thin film transistor. 5. The display device substrate of claim 1 , wherein the semiconductor layer defines an optical sensor. 6. A display device, comprising: the display device substrate of claim 1 ; a second display device substrate located to face the display device substrate; and a display medium layer provided between the display device substrate and the second display device substrate. 7. The display device of claim 6 , wherein the display medium layer is a liquid crystal layer.
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