Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US9238709B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9238709-B2 |
| Application number | US-201414497387-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 26, 2014 |
| Priority date | Mar 29, 2004 |
| Publication date | Jan 19, 2016 |
| Grant date | Jan 19, 2016 |
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The invention provides novel organometallic complexes useful as olefin metathesis catalysts. The complexes have an N-heterocyclic carbene ligand and a chelating carbene ligand associated with a Group 8 transition metal center. The molecular structure of the complexes can be altered so as to provide a substantial latency period. The complexes are particularly useful in catalyzing ring closing metathesis of acyclic olefins and ring opening metathesis polymerization of cyclic olefins.
Opening claim text (preview).
We claim: 1. A method for catalyzing an olefin metathesis reaction, comprising contacting an olefinic reactant with a complex having the structure of formula (I) wherein: α and β represent single bonds or unsaturated bonds, with the proviso that α and β cannot both be unsaturated bonds; M is a Group 8 transition metal; R 1 and R 2 are independently selected from hydrogen, hydrocarbyl, substituted hydrocarbyl, heteroatom-containing hydrocarbyl, substituted heteroatom-containing hydrocarbyl, and functional groups; Q is an organic diradical; X 1 and X 2 are anionic ligands, and may be the same or different; L 1 is a neutral electron donor ligand, and p is zero or 1; when α is a single bond, L 2 is selected from NR 7 R 8 , PR 7 R 8 , N═CR 7 R 8 , and R 7 C═NR 8 , where R 7 and R 8 are independently selected from substituted and/or heteroatom-containing C 1 -C 20 alkyl, C 2 -C 20 alkenyl, C 2 -C 20 alkynyl, and C 5 -C 24 aryl, or R 7 and R 8 can be taken together to form a heterocyclic ring; when α is an unsaturated bond, L 2 is selected from NR′ and PR 7 , where R 7 is as defined previously, or L 2 and Z represent adjacent atoms in an aromatic ring; Y and Z are linkages independently selected from hydrocarbylene, substituted hydrocarbylene, heteroatom-containing hydrocarbylene, substituted heteroatom-containing hydrocarbylene, —O—, —S—, —NR 9 , and —PR 9 —, wherein R 9 is selected from hydrocarbyl, substituted hydrocarbyl, heteroatom-containing hydrocarbyl, and substituted heteroatom-containing hydrocarbyl, and further wherein Y and Z may represent adjacent atoms in an aromatic ring; m is zero or 1; n is zero or 1; and wherein L 2 and the ligand containing Q are bonded to M in a trans orientation, and wherein the olefinic reactant and the complex having the structure of formula (I) are contacted under reaction conditions selected to enable olefin metathesis; and wherein the complex having the structure of formula (I) exhibits a latency period when contacted with the olefinic reactant. 2. The method for catalyzing an olefin metathesis reaction according to claim 1 , wherein the complex has the structure of formula (II) wherein: β represents a single bond or an unsaturated bond; M is a Group 8 transition metal; R 1 and R 2 are independently selected from hydrogen, hydrocarbyl, substituted hydrocarbyl, heteroatom-containing hydrocarbyl, substituted heteroatom-containing hydrocarbyl, and functional groups; Q is an organic diradical; X 1 and X 2 are anionic ligands, and may be the same or different; L 1 is a neutral electron donor ligand, and p is zero or 1; R 7 and R 8 are independently selected from substituted and/or heteroatom-containing C 1 -C 20 alkyl, C 2 -C 20 alkenyl, C 2 -C 20 alkynyl, and C 5 -C 24 aryl, or R 7 and R 8 can be taken together to form a heterocyclic ring; Y and Z are linkages independently selected from hydrocarbylene, substituted hydrocarbylene, heteroatom-containing hydrocarbylene, substituted heteroatom-containing hydrocarbylene, —O—, —S—, —NR 9 , and —PR 9 —, wherein R 9 is selected from hydrocarbyl, substituted hydrocarbyl, heteroatom-containing hydrocarbyl, and substituted heteroatom-containing hydrocarbyl, and further wherein Y and Z may represent adjacent atoms in an aromatic ring; and wherein NR 7 R 8 and the ligand containing Q are bonded to M in a trans orientation. 3. The method for catalyzing an olefin metathesis reaction according to claim 2 , wherein R 7 and R 8 of the complex having the structure of formula (II) are C 1 -C 12 alkyl or C 5 -C 12 aryl, and Y is a substituted or unsubstituted methylene or ethylene linkage. 4. The method for catalyzing an olefin metathesis reaction according to claim 1 , wherein the complex has the structure of formula (III) wherein: β represents a single bond or an unsaturated bond; M is a Group 8 transition metal; R 1 and R 2 are independently selected from hydrogen, hydrocarbyl, substituted hydrocarbyl, heteroatom-containing hydrocarbyl, substituted heteroatom-containing hydrocarbyl, and functional groups; Q is an organic diradical; X 1 and X 2 are anionic ligands, and may be the same or different; L 1 is a neutral electron donor ligand, and p is zero or 1; R 7 and R 8 are independently selected from substituted and/or heteroatom-containing C 1 -C 20 alkyl, C 2 -C 20 alkenyl, C 2 -C 20 alkynyl, and C 5 -C 24 aryl, or R 7 and R 8 can be taken together to form a heterocyclic ring; Y and Z are linkages independently selected from hydrocarbylene, substituted hydrocarbylene, heteroatom-containing hydrocarbylene, substituted heteroatom-containing hydrocarbylene, —O—, —S—, —NR 9 , and —PR 9 —, wherein R 9 is selected from hydrocarbyl, substituted hydrocarbyl, heteroatom-containing hydrocarbyl, and substituted heteroatom-containing hydrocarbyl, and further wherein Y and Z may represent adjacent atoms in an aromatic ring; and wherein PR 7 R 8 and the ligand containing Q are bonded to M in a trans orientation. 5. The method for catalyzing an olefin metathesis reaction according to claim 4 , wherein R 7 and R 8 of the complex having the structure of formula (III) are C 1 -C 12 alkyl or C 5 -C 12 aryl, and Y is a substituted or unsubstituted methylene or ethylene linkage. 6. The method for catalyzing an olefin metathesis reaction according to claim 5 , wherein R 7 and R 8 of the complex having the structure of formula (III) are phenyl and Y is ethylene. 7. The method for catalyzing an olefin metathesis reaction according to claim 1 , wherein the complex has the structure of formula (IV) wherein: M is a Group 8 transition metal; R 1 and R 2 are independently selected from hydrogen, hydrocarbyl, substituted hydrocarbyl, heteroatom-containing hydrocarbyl, substituted heteroatom-containing hydrocarbyl, and functional groups; Q is an organic diradical; X 1 and X 2 are anionic ligands, and may be the same or different; L 1 is a neutral electron donor ligand, and p is zero or 1; Y is a linkage selected from hydrocarbylene, substituted hydrocarbylene, heteroatom-containing hydrocarbylene, substituted heteroatom-containing hydrocarbylene, —O—, —S—, —NR 9 , and —PR 9 —, wherein R 9 is selected from hydrocarbyl, substituted hydrocarbyl, heteroatom-containing hydrocarbyl, and substituted heteroatom-containing hydrocarbyl; and wherein the complex has a pyridine ligand, wherein the pyridine ligand and the ligand containing Q are bonded to M in a trans orientation. 8. The method for catalyzing an olefin metathesis reaction according to claim 1 , wherein the complex has the structure of formula (V) wherein: M is a Group 8 transition metal; R 1 and R 2 are independently selected from hydrogen, hydrocarbyl, substituted hydrocarbyl, heteroatom-containing hydrocarbyl, substituted heteroatom-containing hydrocarbyl, and functional groups; Q is an organic diradical; X 1 and X 2 are anionic ligands, and may be the same or different; L 1 is a neutral electron donor ligand, and p is zero or 1; and R 7 is selected from substituted and/or heteroatom-containing C
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