Method for processing plate object

Patent metadata

Field	Value
Publication number	US-9238288-B2
Application number	US-201314104761-A
Country	US
Kind code	B2
Filing date	Dec 12, 2013
Priority date	Dec 27, 2012
Publication date	Jan 19, 2016
Grant date	Jan 19, 2016

Abstract

In a method for processing a plate object, etching is performed for a flat plate object by a predetermined etching method and the shape of the plate object after the etching is grasped in advance. In a grinding step, the plate object is ground into a grinding-finished shape that is a non-flat shape obtained by inverting the shape of the plate object after the etching to the reverse shape. When subsequent etching by the predetermined etching method is performed for a grinding-target surface, the plate object is formed into a flat shape with a uniform thickness.

First claim

What is claimed is:

1. A method for processing a plate object, the method comprising the steps of:
performing pre-etching for a grinding-target surface of a first plate object that is flat prior to the pre-etching;
checking a shape of the first plate object after the pre-etching;
obtaining a grinding-finished-shape of a second plate object by inverting the shape of the first plate object after the pre-etching to the reverse shape;
grinding the second plate object held by a holding table having a holding surface to hold the second plate object by a grinding unit having a grinding stone to thin the second plate object to a predetermined thickness having the grinding-finished-shape obtained; and
etching a grinding-target surface of the second plate object after carrying out the grinding.

2. The method for processing a plate object according to claim 1 ,
wherein in the grinding, the second plate object is formed into the non-flat shape by performing grinding while making the grinding stone abut against the second plate object held by the holding table in a state in which the holding surface of the holding table that holds the second plate object and a grinding surface of the grinding stone are relatively inclined to be set non-parallel to each other.

3. The method for processing a plate object according to claim 1 ,
wherein the first and the second plate object each has a circular disc shape and a sectional shape of the first plate object checked in the checking is either a double-concave shape in which the periphery of the center of the first plate object has a concave shape or a double-convex shape in which the periphery of the center of the first plate object has a convex shape,
the sectional shape of the second plate object is so formed as to become the double-convex shape in which the periphery of the center of the second plate object has a convex shape in the grinding, if the sectional shape of the first plate object checked in the checking is the double-concave shape in which the periphery of the center of the first plate object has a concave shape, and
the sectional shape of the second plate object is so formed as to become the double-concave shape in which the periphery of the center of the second plate object has a concave shape in the grinding, if the sectional shape of the first plate object checked in the checking is the double-convex shape in which the periphery of the center of the first plate object has a convex shape.

Assignees

• Disco Corp

Inventors

• Sugiya Tetsukazu
• Hayakawa Susumu

Classifications

• B24B7/04

  involving a rotary work-table · CPC title

• B24B1/00 Primary

  Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes · CPC title

• H10P52/402 Primary

  of semiconductor materials · CPC title