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Apparatus and method for improving contrast detected in a fringe projection autofocus system
US9237261B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9237261-B2 |
| Application number | US-201313746229-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 21, 2013 |
| Priority date | Jan 22, 2012 |
| Publication date | Jan 12, 2016 |
| Grant date | Jan 12, 2016 |
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Abstract
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A method and apparatus are provided, for improving contrast detected in a fringe projection autofocus system that projects light from a substrate to a digital camera. The method and apparatus reduce the fill factor of the digital camera in a direction that improves the contrast at spatial frequencies near or above the Nyquist limit in that direction.
First claim
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The invention claimed is: 1. A method for improving contrast in a fringe projection autofocus system, the method comprising: scanning the substrate in a direction of a scan; forming an image of a fringe pattern, formed by a fringe projection portion of the fringe projection autofocus system on a substrate, at a surface of a digital camera by projecting light reflected from the substrate in a direction that is oblique with respect to the substrate, wherein said fringe pattern is…
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- What does patent US9237261B2 cover?
- A method and apparatus are provided, for improving contrast detected in a fringe projection autofocus system that projects light from a substrate to a digital camera. The method and apparatus reduce the fill factor of the digital camera in a direction that improves the contrast at spatial frequencies near or above the Nyquist limit in that direction.
- Who is the assignee on this patent?
- Nikon Corp
- What technology area does this patent fall under?
- Primary CPC classification H04N25/60. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jan 12 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).