Electrostatic adsorptive belt and method of manufacturing thereof, assembly, and conveyance system

Patent metadata

Field	Value
Publication number	US-9233558-B2
Application number	US-201414531165-A
Country	US
Kind code	B2
Filing date	Nov 3, 2014
Priority date	Nov 5, 2013
Publication date	Jan 12, 2016
Grant date	Jan 12, 2016

Abstract

There is provided with a method of manufacturing an electrostatic adsorptive belt. A portion for forming an electrode pattern on a first resin layer is irradiated with an ultraviolet laser beam. A region including the portion for forming the electrode pattern on the first resin layer is oxidated. The electrode pattern if formed on the first region layer by plating. A second resin layer is formed on a surface of the first resin layer on which the electrode pattern is formed.

First claim

What is claimed is:

1. A method of manufacturing an electrostatic adsorptive belt, comprising:
irradiating, with an ultraviolet laser beam, a portion for forming an electrode pattern on a first resin layer;
oxidating a region including the portion for forming the electrode pattern on the first resin layer;
forming the electrode pattern on the first region layer by plating; and
forming a second resin layer on a surface of the first resin layer on which the electrode pattern is formed.

2. The method according to claim 1 , wherein the ultraviolet laser beam has a wavelength of not more than 243 nm.

3. The method according to claim 1 , wherein in the oxidating, ultraviolet light having a wavelength of not more than 243 nm is emitted by using an ultraviolet lamp.

4. The method according to claim 1 , wherein
the ultraviolet laser beam has a wavelength of not more than 243 nm,
in the oxidating, ultraviolet light having a wavelength of not more than 243 nm is emitted, and
the irradiating and the oxidating are performed in an atmosphere containing at least one of oxygen or ozone.

5. The method according to claim 1 , further comprising, before forming the electrode pattern, forming a perforation in the portion for forming the electrode pattern on the first resin layer.

6. The method according to claim 5 , wherein in forming the perforation, the perforation is formed by irradiation with the ultraviolet laser beam.

7. The method according to claim 1 , further comprising, before forming the second resin layer and after forming the electrode pattern, smoothing a surface of a laminate comprising the first resin layer and the electrode pattern, on which the electrode pattern is formed.

8. The method according to claim 1 , wherein the first resin layer contains at least one material selected from the group consisting of cycloolefin polymer, polystyrene, polyethylene terephthalate, and polyvinyl chloride.

Assignees

• Canon Components Kk

Inventors

• Kanome Osamu
• Iwashita Taisuke

Classifications

• H10P72/3314

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/3202

  Mechanical details, e.g. rollers or belts · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H01L21/67706

  Electricity · mapped topic

• H01L21/6831

  Electricity · mapped topic