Laser apparatus

Patent metadata

Field	Value
Publication number	US-9231364-B2
Application number	US-201414263205-A
Country	US
Kind code	B2
Filing date	Apr 28, 2014
Priority date	May 2, 2013
Publication date	Jan 5, 2016
Grant date	Jan 5, 2016

Abstract

A laser light generator emits laser light, a frequency of which can be adjusted. A laser light detector bombards an iodine cell with the laser light and photoelectrically converts the laser light that has passed through the iodine cell, then outputs a light output signal. A third order differential lock-in amplifier generates a third order differential signal of the light output signal. A frequency locker causes the laser light generator to change the frequency of the laser light within a predetermined range, detects an amplitude corresponding to a saturated absorption line occurring in the third order differential signal, and causes the frequency of the laser light to stabilize to a predetermined value. An error detector outputs an error signal in a case where the amplitude corresponding to the saturated absorption line occurring in the third order differential signal is greater than a predetermined value.

First claim

What is claimed is:

1. A laser apparatus, comprising:
a laser light generator configured to emit laser light, and further configured to adjust a frequency of the laser light;
a laser light detector configured to bombard an iodine cell with the laser light, photoelectrically convert the laser light that has passed through the iodine cell, and then to output a first light output signal;
a differential signal generator configured to generate a differential signal of the first light output signal;
a frequency locker configured to control the laser light generator to change the frequency of the laser light within a predetermined range, the frequency locker additionally configured to detect an amplitude corresponding to a saturated absorption line occurring in the differential signal, and further configured to stabilize the frequency of the laser light to a predetermined value; and
an error detector configured to output a first error signal when the amplitude corresponding to the saturated absorption line occurring in the differential signal is greater than a predetermined value.

2. The laser apparatus according to claim 1 further comprising a drive status controller configured to control initiation and suspension of frequency stabilizing control of the laser light by the frequency locker in response to an input drive status control signal.

3. The laser apparatus according to claim 2 further comprising a suspension determiner configured to output the drive status control signal to the drive status controller in a case where the first error signal has been output, the drive status control signal being output so as to suspend the frequency stabilizing control of the laser light by the frequency locker.

4. The laser apparatus according to claim 3 further comprising a laser drive controller configured to control an optical intensity of the laser light emitted from the laser light generator in response to a second light output signal, wherein:
the laser light detector photoelectrically converts the laser light and outputs the second light output signal, and
the drive status controller controls initiation and suspension of optical intensity control of the laser light by the laser drive controller in response to the drive status control signal.

5. The laser apparatus according to claim 4 , wherein:
the laser light generator comprises a laser as a light source, and
the laser drive controller supplies drive current to the laser based on the second light output signal.

6. The laser apparatus according to claim 5 , wherein the error detector outputs a second error signal when the drive current is greater than a predetermined value.

7. The laser apparatus according to claim 6 , wherein the suspension determiner outputs the drive status control signal to the drive status controller when the second error signal has been output, the drive status control signal being output so as to suspend the frequency stabilizing control of the laser light by the frequency locker and suspend the optical intensity control of the laser light by the laser drive controller.

8. The laser apparatus according to claim 7 , wherein the suspension determiner outputs the drive status control signal to the drive status controller when the first error signal and the second error signal have not been output due to a reset, the drive status control signal being output so as to initiate the frequency stabilizing control of the laser light by the frequency locker and initiate the optical intensity control of the laser light by the laser drive controller.

9. The laser apparatus according to claim 8 further comprising an error resetter configured to execute a reset operation causing the error detector to reset the first error signal in when the first error signal has been input and an error reset denial signal has not been input.

10. The laser apparatus according to claim 9 , wherein when the first error signal is output from the error detector after the reset operation has been performed a predetermined number of times, the error resetter does not execute the reset operation.

Assignees

• Mitutoyo Corp

Inventors

• Yano Ryunosuke

Classifications

• H01S3/09415

  the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping · CPC title

• H01S3/1392

  by using a passive reference, e.g. absorption cell (H01S3/1396, H01S3/1398 take precedence) · CPC title

• H01S3/1611

  neodymium · CPC title

• H01S3/109

  Frequency multiplication, e.g. harmonic generation · CPC title

• H01S3/025

  of solid state lasers, e.g. housings or mountings · CPC title