Methods for integrating and forming optically transparent devices on surfaces

Patent metadata

Field	Value
Publication number	US-9231213-B2
Application number	US-201414560888-A
Country	US
Kind code	B2
Filing date	Dec 4, 2014
Priority date	Dec 6, 2012
Publication date	Jan 5, 2016
Grant date	Jan 5, 2016

Abstract

An apparatus, system, and/or method are described to enable optically transparent reconfigurable integrated electrical components, such as antennas and RF circuits to be integrated into an optically transparent host platform, such as glass. In one embodiment, an Ag NW film may be configured as a transparent conductor for antennas and/or as interconnects for passive circuit components, such as capacitors or resistors. Ag NW may also be used as transmission lines and/or interconnect overlays for devices. A graphene film may also be configured as active channel material for making active RF devices, such as amplifiers and switches.

First claim

The invention claimed is:

1. A device, comprising:
one of a transparent and substantially transparent substrate;
an optically transparent active device on the substrate, wherein the optically transparent active device comprises a plurality of silver nanowire contacts and a graphene channel;
a silver nanowire film, the silver nanowire film disposed on at least a portion of the substrate; and
a dielectric material disposed on at least a portion of the silver nanowire film.

2. The device of claim 1 further comprising one or more of an antenna, interconnects, transmission lines, a Frequency Selective Surface, a resistor, capacitor, or an inductor.

3. The device of claim 1 , wherein substrate is formed at least in part from one of glass and plexiglass.

4. The device of claim 2 , wherein the antenna is configured to operate at one of RF, microwave and millimeter-wave frequencies.

5. The device of claim 2 , wherein the antenna comprises one of a silver nanowire film, a metal line and a slot formed on the substrate.

6. The device of claim 2 further comprising a conductor embedded along an edge of one of the antenna, interconnect, and transmission line.

7. The device of claim 2 , wherein the capacitor comprises one of silicon nitride and hafnium oxide (HfO 2 ), and the silver nanowire film is configured as an ohmic contact.

8. The device of claim 2 , wherein the dielectric material comprises one of aluminum oxide (Al 2 O 3 ), silicon dioxide (SiO 2 ), and hafnium oxide (HfO 2 ).

9. The device of claim 1 wherein the optically transparent active device comprises:
a gate electrode on the substrate;
an insulator on the gate electrode;
a graphene layer on the insulator;
a source contact formed from silver nanowire on a first portion of the graphene film and insulated from the gate by the insulator; and
a drain contact formed from silver nanowire on a second portion of the graphene film and insulated from the gate by the insulator.

10. The device of claim 1 wherein the optically transparent active device comprises:
a graphene layer on the substrate;
an insulator on the graphene layer;
a gate on the insulator;
a source contact formed from silver nanowire on a first portion of the graphene film and insulated from the gate by the insulator; and
a drain contact formed from silver nanowire on a second portion of the graphene film and insulated from the gate by the insulator.

11. A method of forming a passive electrical device, comprising:
receiving one of a transparent and a substantially transparent substrate;
forming a graphene layer on a portion of the substrate;
forming a silver nanowire film on the substrate;
etching the silver nanowire film; and
coating a portion of the silver nanowire film with a dielectric material, wherein the dielectric material is not graphene.

12. The method of claim 11 , wherein the etching the silver nanowire film further comprises etching the silver nanowire film with an etchant comprising Nickel etchant TFB.

13. The method of claim 11 , wherein the coating a portion comprises coating a portion of the silver nanowire film with one of aluminum oxide (Al 2 O 3 ), silicon dioxide (SiO 2 ), and hafnium oxide (HfO 2 ).

14. The method of claim 11 , wherein the electrical device further comprises one of an antenna, a Frequency Selective Surface, a resistor, capacitor, or an inductor.

15. A device, comprising
one of a substantially and a transparent substrate;
a graphene film on a portion of the substrate;
a plurality of contacts formed from silver nanowire on a portion of the graphene film; and
one of an antenna, a Frequency Selective Surface, a resistor, capacitor, or an inductor.

16. The device of claim 15 , wherein the substrate is configured to operate with one of RF-based frequency, -selectivity, -amplification, -switching, and -mixing.

17. The device of claim 15 , wherein a gate electrode comprises one of gold, copper, Indium-tin Oxide (ITO) and Indium-zinc Oxide (IZO).

18. A method of forming an electrical device, comprising:
receiving one of a substantially transparent and transparent substrate;
forming a graphene film on a portion of the substrate; and source or drain
forming a plurality of contacts on the graphene film from silver nanowire.

19. The method of claim 18 , wherein the providing a substrate further comprises providing a substrate including one of glass and plexiglass.

20. The method of claim 18 further comprising transferring the graphene to the substrate using at least thermal release tape.

21. The method of claim 18 further comprising forming one of a metal line and a slot in the substrate.

22. The method of claim 18 further comprising providing a gate formed from one of gold, copper, Indium-tin Oxide (ITO) and Indium-zinc Oxide (IZO).

23. The method of claim 18 further comprising forming one of an antenna, a Frequency Selective Surface, a resistor, capacitor, or an inductor from silver nanowire.

24. A method of forming an electrical device, comprising:
receiving one of a substantially transparent and transparent substrate;
forming a gate electrode on a portion of the substrate;
forming an insulator over the gate electrode; and
forming a graphene film on a portion of the insulator;
forming a source contact from silver nanowire on a first portion of the graphene film; and
forming a drain contact from silver nanowire on a second portion of the graphene film.

25. The method of claim 24 , wherein the providing a substrate further comprises providing a substrate including one of glass and plexiglass.

26. The method of claim 24 further comprising forming one of a metal line and a slot in the substrate.

27. The method of claim 24 further comprising forming the gate from one of gold, copper, Indium-tin Oxide (ITO) and Indium-zinc Oxide (IZO).

28. The method of claim 24 further comprising forming one of an antenna, a Frequency Selective Surface, a resistor, capacitor, or an inductor from silver nanowire.

29. A method of forming an electrical device comprising;
receiving one of a substantially transparent and transparent substrate;
forming a graphene layer on the substrate;
forming an insulator on the graphene layer;
forming a gate on the insulator;
forming a source contact formed from silver nanowire on a first portion of the graphene film and insulated from the gate by the insulator; and
forming a drain contact formed from silver nanowire on a second portion of the graphene film and insulated from the gate by the insulator.

30. The method of claim 29 further comprising forming one of an antenna, a Frequency Selective Surface, a resistor, capacitor, or an inductor from silver nanowire.

Assignees

• Hrl Lab Llc
• Hrl Lab Llc

Inventors

• Song Hyok J
• Schaffner James H
• Moon Jeong-Sun
• Son Kyung-Ah

Classifications

• H05K1/181

  associated with surface mounted components · CPC title

• H01Q1/38 Primary

  formed by a conductive layer on an insulating support {(patch antennas H01Q9/0407; microstrip dipole antennas H01Q9/065; microstrip slot antennas H01Q13/106; transmission line microstrip antennas H01Q13/206; manufacturing reflecting surfaces using insulating material for supporting the reflecting surface  H01Q15/142)} · CPC title

• H01Q1/28

  Adaptation for use in or on aircraft, missiles, satellites, or balloons · CPC title

• H05K2201/026

  Nanotubes or nanowires · CPC title

• H05K1/09

  Use of materials for the {conductive, e.g. } metallic pattern · CPC title