Cathode obtaining method and electron beam writing apparatus
US-2015357146-A1 · Dec 10, 2015 · US
US9230770B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9230770-B2 |
| Application number | US-201113704902-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 23, 2011 |
| Priority date | Jun 17, 2010 |
| Publication date | Jan 5, 2016 |
| Grant date | Jan 5, 2016 |
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The present invention relates to a conductive nanostructure, a method for molding the same, and a method for manufacturing a field emitter using the same. More particularly, the present invention relates to a field-emitting nanostructure comprising a conductive substrate, a conductive nanostructure arranged on the conductive substrate, and a conductive interfacial compound disposed in the interface between the conductive substrate and the conductive nanostructure, as well as to a method for molding the same, and a method for manufacturing a field emitter using the same.
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What is claimed is: 1. A method for molding a conductive nanostructure comprising the steps of: (a) a process for forming a conductive nanostructure arranged on a conductive substrate; and (b) an electrical discharge machining process for the conductive nanostructure in an air environment, wherein the step (b) comprises forming a conductive interfacial compound between the conductive substrate and the conductive nanostructure. 2. The method of claim 1 , wherein a contact resistance between the conductive substrate and the conductive nanostructure is reduced in the (b) step. 3. The method of claim 1 , wherein the conductive nanostructure includes CNT (carbon nanotube). 4. The method of claim 1 , wherein the conductive nanostructure additionally includes metal or metallic oxide. 5. The method of claim 1 , wherein the (b) step includes an electrical discharge cutting process for the conductive nanostructure to have a predetermined length. 6. The method of claim 1 , wherein the (b) step comprises: (b1) a process for providing an electrical discharge machining electrode; and (b2) a process for generating an electrical discharge between the conductive nanostructure and the electrical discharge machining electrode. 7. The method of claim 1 , the (b) step comprises the steps of: (b1) a process for isolating and arranging the conductive nanostructure and the electrical discharge machining electrode in an air environment; (b2) a process for applying a voltage between the conductive nanostructure and the electrical discharge machining electrode; and (b3) a process for closing the conductive nanostructure to the electrical discharge machining electrode in which the voltage is applied to generate an electrical discharge. 8. The method of claim 6 , wherein the electrical discharge machining electrode is formed in a wire or cylindrical shaped. 9. The method of claim 6 , wherein the electrical discharge machining electrode is at least one selected from the group consisting of brass, graphite, silver-tungsten alloy, copper-tungsten alloy, iron, copper, zinc, phosphor bronze and aluminum or alloy thereof.
Point emitters · CPC title
Metals and metal alloys · CPC title
Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects (heat treatment by cathodic discharge C21D1/38) · CPC title
oxides · CPC title
mainly consisting of carbon-silicon compounds, carbon or silicon · CPC title
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