Alignment methods in fluid-filled MEMS displays

Patent metadata

Field	Value
Publication number	US-9229222-B2
Application number	US-97539707-A
Country	US
Kind code	B2
Filing date	Oct 19, 2007
Priority date	Feb 23, 2005
Publication date	Jan 5, 2016
Grant date	Jan 5, 2016

Abstract

This invention relates to MEMS display apparatus and methods for assembly thereof that include a plurality of light modulators having components substantially surrounded in a liquid that reduces the effects of stiction and improves the optical and electromechanical performance of the display apparatus. The invention also relates to methods for aligning components of a MEMS display to establish a correspondence between the plurality of light modulators and a plurality of apertures to regulate the transmission of light through the apparatus.

First claim

What is claimed is:

1. A display assembly comprising:
an array of MEMS light modulators formed on a first substrate, each of the MEMS light modulators including a shutter that moves in a plane substantially parallel to the first substrate;
a second substrate separated from the first substrate by a gap;
an array of spacers arranged between the first and second substrates, the number of spacers being proportional to the number of MEMS light modulators;
a hydrophobic liquid disposed between the first and second substrates substantially surrounding a movable portion of each MEMS light modulator, the movable portion including an actuator having a first flexible electrode and a second flexible electrode; and
a moisture resistant polymer seal surrounding the array of MEMS light modulators to contain the hydrophobic liquid between the two substrates, the polymer seal including a polymer that serves to adhere the first substrate to the second substrate.

2. The display assembly of claim 1 , wherein the hydrophobic liquid comprises a lubricant.

3. The display assembly of claim 1 , comprising a reflective aperture layer disposed on one of the first and second substrates.

4. The display assembly of claim 3 , wherein the hydrophobic liquid has a first index of refraction and the substrate on which the reflective aperture layer is disposed has a second index of refraction, and wherein the first index of refraction is greater than or substantially equal to that of the second index of refraction.

5. The display assembly of claim 1 , wherein the hydrophobic liquid is non-conductive.

6. The display assembly of claim 1 , wherein the hydrophobic liquid has a dielectric constant greater than 2.0.

7. The display assembly of claim 1 , wherein the hydrophobic liquid wets a surface of the MEMS modulators in the array of MEMS light modulators.

8. The display assembly of claim 7 , wherein each of the MEMS light modulators includes a front side and a rear side, and wherein the hydrophobic liquid wets both the front and rear sides of the MEMS light modulators.

9. The display assembly of claim 1 , wherein each of the MEMS light modulators includes a component that is controllably moved through the hydrophobic liquid.

10. The display assembly of claim 1 , wherein the hydrophobic liquid is a single hydrophobic liquid.

11. The display assembly of claim 1 , wherein the polymer seal is an epoxy.

12. The display assembly of claim 1 , wherein each spacer of the array of spacers is arranged within or adjacent to a pixel of the display assembly.

13. The display assembly of claim 1 , wherein each spacer of the array is arranged to maintain a substantially uniform pressure on the hydrophobic liquid.

14. The display assembly of claim 1 , wherein each spacer of the array of spacers is associated with one or more MEMS light modulators.

15. The display assembly of claim 1 , wherein each spacer of the array of spacers is associated with a group of two or more MEMS light modulators.

16. The display assembly of claim 1 , wherein each spacer of the array of spacers is associated with a group of sixteen or more MEMS light modulators.

17. The display assembly of claim 1 , wherein each MEMS light modulator is associated with one or more spacers of the array of spacers.

18. The display assembly of claim 1 , wherein the density of the spacers of the array of spacers is arranged to maintain the second substrate at about a constant distance away from each of the MEMS light modulators of the array of MEMS light modulators.

19. The display assembly of claim 1 , wherein the moisture resistant polymer seal is located within the gap.

20. The display assembly of claim 1 , wherein the moisture resistant polymer seal adheres to a surface of the first substrate facing the gap and to a surface of the second substrate facing the gap.

21. The display assembly of claim 1 , wherein the first flexible electrode includes a support beam connected to the shutter.

22. The display assembly of claim 1 , wherein each spacer includes a first portion and a second portion, the first portion including a heat reflowable material.

23. The display assembly of claim 22 , wherein the material functions as an adhesive to bond the first portion with the second portion.

24. The display assembly of claim 22 , wherein the first portion is formed on the first substrate and the second portion is formed on the second substrate.

25. The display assembly of claim 22 , wherein the material includes a metal alloy.

26. The display assembly of claim 25 , wherein the metal alloy includes at least one of Pb—Sn alloys, Pb—In alloys, Tn—Sn alloys, In—Cu—Sn alloys, Au—Sn alloys, and Bi—Sn alloys.

27. The display assembly of claim 22 , wherein the material includes one of substantially pure In, Sn, Ga, and Bi.

28. The display assembly of claim 22 , wherein the material is non-metallic.

29. The display assembly of claim 28 , wherein the material includes glass.

30. The display assembly of claim 28 , wherein the material includes at least one of barium-silicate, a lead-silicate glass, and a thermoplastic polymer.

31. The display assembly of claim 30 , wherein the thermoplastic polymer includes at least one of polyethylene, polystyrene, polypropylene, and natural or synthetic waxes.

Assignees

• Hagood Nesbitt W
• Fijol John J
• Steyn Jasper Lodewyk
• Payne Richard S
• Gandhi Jignesh
• Pixtronix Inc

Inventors

• Hagood Nesbitt W
• Fijol John J
• Steyn Jasper Lodewyk
• Payne Richard S
• Gandhi Jignesh

Classifications

• B81C2203/0118

  Bonding a wafer on the substrate, i.e. where the cap consists of another wafer · CPC title

• G09G2300/0842

  forming a memory circuit, e.g. a dynamic memory with one capacitor · CPC title

• B81B2201/047

  Optical MEMS not provided for in B81B2201/042 - B81B2201/045 · CPC title

• G09G2300/023

  Display panel composed of stacked panels · CPC title

• B81B2203/0315

  Cavities · CPC title