Integrated optoelectronic module

Patent metadata

Field	Value
Publication number	US-9229179-B2
Application number	US-201313919854-A
Country	US
Kind code	B2
Filing date	Jun 17, 2013
Priority date	Jun 22, 2012
Publication date	Jan 5, 2016
Grant date	Jan 5, 2016

Abstract

An integrated optoelectronic module comprising: a semiconductor substrate; a single-mode optical waveguide comprising a semiconductor with a signal input section at a first end; a multi-mode optical waveguide comprising a semiconductor connected to a second end of the single-mode optical waveguide; and a photodiode disposed on and adjacent to the multi-mode interferometer waveguide and having at least one optical absorption layer section, wherein the single-mode optical waveguide, the multi-mode optical waveguide, and the photodiode being stacked on the semiconductor substrate, wherein the multi-mode interferometer waveguide comprises a reflection section formed by partly grooving the multi-mode interferometer waveguide, and an optical signal having propagated through the multi-mode interferometer waveguide is reflected by the reflection section and focused on the optical absorption layer section.

First claim

What is claimed is:

1. An integrated optoelectronic module comprising:
a semiconductor substrate;
a single-mode optical waveguide comprising a semiconductor core with a signal input section at a first end;
a multi-mode interferometer waveguide comprising a semiconductor core connected to a second end of the core of the single-mode optical waveguide; and
a photodiode stacked directly on the multi-mode interferometer waveguide and having at least one optical absorption layer section,
wherein the single-mode optical waveguide and the multi-mode interferometer waveguide are stacked on the semiconductor substrate, and
wherein the multi-mode interferometer waveguide comprises a reflection section formed by partly grooving the core of the multi-mode interferometer waveguide, so that an optical signal having propagated through the multi-mode interferometer waveguide is reflected by the reflection section and focused on the optical absorption layer section.

2. The integrated optoelectronic module according to claim 1 , wherein the reflection section comprises an inclined surface of the core of the multi-mode interferometer waveguide.

3. The integrated optoelectronic module according to claim 2 , wherein a low-index material is filled into a cavity in the grooved section for flattening in such a manner that the grooved section is flush with the multi-mode interferometer waveguide.

4. The integrated optoelectronic module according to claim 2 , wherein a metal reflection mirror or a multiple dielectric layer reflection mirror is provided on the inclined surface of the reflection section.

5. The integrated optoelectronic module according to claim 3 , wherein a metal reflection mirror or a multiple dielectric layer reflection mirror is provided on the inclined surface of the reflection section.

6. An integrated optoelectronic array comprising
a 1×N (N is an integer) optical branching waveguide and
a plurality of integrated optoelectronic modules, each according to claim 1 ,
wherein the integrated optoelectronic modules are connected to respective N output sections of the 1×N optical branching waveguides formed on an identical semiconductor substrate.

7. An integrated optoelectronic antenna comprising an electric line and an antenna pattern which are connected to a photodiode in the integrated optoelectronic module according to claim 1 .

8. An integrated optoelectronic array comprising:
a 1×N (N being an integer) optical branching waveguide; and
a plurality of integrated optoelectronic modules, each according to claim 1 ,
wherein the integrated optoelectronic modules are connected to respective N output sections of the 1×N optical branching waveguides formed on an identical semiconductor substrate.

9. An integrated optoelectronic antenna comprising:
an electric line;
an antenna pattern; and
an integrated optoelectronic module according to claim 1 , the electric line and the antenna pattern being connected to the photodiode of the integrated optoelectronic module.

10. An integrated optoelectronic module comprising:
a semiconductor substrate;
a single-mode optical waveguide stacked on the semiconductor substrate, the single-mode optical waveguide being comprised of a semiconductor core extending from a signal input section at a first end to a second end;
a multi-mode interferometer waveguide stacked on the semiconductor substrate, the multi-mode interferometer waveguide being comprised of a semiconductor core connected to and extending from the second end of the core of the single-mode optical waveguide, a portion of the core of the multi-mode interferometer waveguide being grooved to form a reflection section; and
a photodiode stacked directly on the multi-mode interferometer waveguide, the photodiode having an optical absorption layer section,
wherein the optical absorption layer section and the reflection section are positioned such that when an optical signal is input into the signal input section of the single-mode optical waveguide, the signal propagates through the single-mode optical waveguide and into the multi-mode interferometer waveguide and is reflected by the reflection section of the multi-mode interferometer waveguide so as to become focused on the optical absorption layer section of the photodiode.

11. The integrated optoelectronic module recited in claim 10 , wherein the reflection section has an inclined surface formed on the core of the multi-mode interferometer waveguide.

12. An integrated optoelectronic module comprising:
a semiconductor substrate;
a single-mode optical waveguide comprising a semiconductor core with a signal input section at a first end;
a multi-mode interferometer waveguide comprising a semiconductor core connected to a second end of the core of the single-mode optical waveguide; and
a photodiode stacked directly on the multi-mode interferometer waveguide and having at least one optical absorption layer section,
wherein the single-mode optical waveguide and the multi-mode interferometer waveguide are stacked on the semiconductor substrate, and
wherein the multi-mode interferometer waveguide comprises a reflection section formed by partly grooving the core of the multi-mode interferometer waveguide, so that an optical signal having propagated through the multi-mode interferometer waveguide is reflected by the reflection section of the multi-mode interferometer waveguide to a location at which the optical signal intensities concentrate due to the interference effect of multi-mode interference light, the location being positioned at the optical absorption layer section.

Assignees

• Ntt Electronics Corp

Inventors

• Ishibashi Tadao

Classifications

• G02B6/12004

  Combinations of two or more optical elements · CPC title

• G02B6/12002

  Three-dimensional structures · CPC title

• G02B6/4214 Primary

  the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device (G02B6/4246 takes precedence) · CPC title