Waveguide and integrated circuit

Patent metadata

Field	Value
Publication number	US-9229161-B2
Application number	US-201213729922-A
Country	US
Kind code	B2
Filing date	Dec 28, 2012
Priority date	Mar 26, 2012
Publication date	Jan 5, 2016
Grant date	Jan 5, 2016

Abstract

According to one embodiment, a waveguide includes: a substrate and a member. The member covers at least a part of the substrate and has a difference in the refractive index from the substrate not less than 2. A plurality of concave parts are provided on the substrate. The concave parts are arrayed on an upper face of the substrate. At least a part of a side face of each of the concave parts includes an arc. An inner diameter of each of the concave parts is not more than 50 nm. Intervals of the neighboring concave parts are not more than the inner diameter. The member fills the concave part.

First claim

What is claimed is:

1. A waveguide comprising:
a substrate; and
a member covering at least a part of the substrate and having a difference in the refractive index from the substrate not less than 2,
a plurality of concave parts being provided on the substrate, the concave parts being arrayed on an upper face of the substrate, at least a part of a side face of each of the concave parts being curved, an inner diameter of each of the concave parts being not more than 50 nm, and intervals of the neighboring concave parts being not more than the inner diameter, and the member filling the concave part.

2. The waveguide according to claim 1 , wherein
the substrate includes a semiconductor, and
the member includes air.

3. The waveguide according to claim 2 , wherein
the semiconductor of the substrate is Si.

4. The waveguide according to claim 1 , wherein
a shape of the member is cylindrical.

5. The waveguide according to claim 1 , wherein
a shape of the member is spherical.

6. The waveguide according to claim 1 , wherein
the inner diameter is not more than 10 nm.

7. The waveguide according to claim 1 , wherein
a depth of the concave part is 0.1 to 50 nm.

8. The waveguide according to claim 2 , wherein
air filling the concave parts form air discs, and
neighboring air discs are in contact.

9. The waveguide according to claim 1 , wherein
the array includes a portion extending in one direction and a portion extending in another direction intersecting with the one direction.

10. A waveguide comprising:
a plurality of bodies, at least a part of a cross-section of each of the bodies being curved, the bodies being arrayed on a face parallel to the cross-section, a size of each of the bodies being not more than 50 nm, one of the bodies contacting another one of the bodies neighboring the one of the bodies and
a member covering at least a part of each of the bodies and having a difference in the refractive index from the bodies not less than 2.

11. The waveguide according to claim 10 , wherein the bodies include a semiconductor, and the member includes air.

12. The waveguide according to claim 10 , wherein
the bodies include an insulator, and
the member includes metal.

13. The waveguide according to claim 10 , wherein
the bodies include metal, and
the member includes an insulator.

14. The waveguide according to claim 10 , wherein the size is not more than 10 nm.

15. The waveguide according to claim 11 , wherein
the semiconductor is Si.

16. The waveguide according to claim 13 , wherein
the insulator is a silicon oxide film.

17. The waveguide according to claim 10 , wherein the member is provided on a substrate, the bodies are cylindrical, and a lower face of the bodies is in contact with the substrate.

18. The waveguide according to claim 13 , wherein
the metal includes at least one metal selected from a group consisting of gold, silver, copper, aluminum, and chromium.

19. The waveguide according to claim 13 , wherein
the insulator is a silicon film.

20. The waveguide according to claim 1 , wherein the at least the part of the side face of each of the concave parts includes an arc.

21. The waveguide according to claim 10 , wherein the at least the part of a cross-section of each of the bodies includes an arc.

22. The waveguide according to claim 10 , wherein the bodies are cylindrical or spherical.

Assignees

• Todori Kenji
• Fukuzumi Yoshiaki
• Aochi Hideaki
• Tada Tsukasa
• Yamada Ko
• Mori Shigehiko
• Shida Naomi
• Yoshimura Reiko
• Toshiba Kk

Inventors

• Todori Kenji
• Fukuzumi Yoshiaki
• Aochi Hideaki
• Tada Tsukasa
• Yamada Ko
• Mori Shigehiko
• Shida Naomi
• Yoshimura Reiko

Classifications

• G02B6/1223

  high refractive index type, i.e. high-contrast waveguides · CPC title

• G02B6/125

  Bends, branchings or intersections · CPC title

• G02B6/122 Primary

  Basic optical elements, e.g. light-guiding paths · CPC title

• B82Y20/00

  Nanooptics, e.g. quantum optics or photonic crystals · CPC title

• G02B6/12 Primary

  of the integrated circuit kind (electric integrated circuits H10B, H10D84/00 - H10D89/00, H10F19/00, H10F39/00, H10H29/00, H10K19/00, H10K39/00, H10K59/00, H10N19/00, H10N39/00, H10N59/00, H10N69/00, H10N79/00, H10N89/00) · CPC title