Twin sub-wavelength grating optical signal processor

Patent metadata

Field	Value
Publication number	US-9229138-B2
Application number	US-201013500833-A
Country	US
Kind code	B2
Filing date	Oct 5, 2010
Priority date	Oct 6, 2009
Publication date	Jan 5, 2016
Grant date	Jan 5, 2016

Abstract

An optical signal processor includes a first sub-wavelength grating having a first grating period and a second sub-wavelength grating having a second grating period that is different than the first grating period of the first sub-wavelength grating.

First claim

What is claimed is:

1. An optical signal processor comprising:
a first sub-wavelength grating having a first grating period; and
a second sub-wavelength grating having a second grating period that is different than the first grating period of the first sub-wavelength grating,
wherein the first grating period and the second grating period are less than a wavelength of a light source, and wherein at least one of the first sub-wavelength grating or the second sub-wavelength grating is transparent to the light source.

2. The optical signal processor of claim 1 , wherein the wavelength of the light source comprises a wavelength in a region of a light spectrum of at least one of: an ultraviolet region, a visible region, an infrared region, a terahertz radiation region or a microwave region.

3. The optical signal processor of claim 1 , further comprising:
a gap between the first sub-wavelength grating and the second sub-wavelength grating.

4. The optical signal processor of claim 3 , wherein the gap is approximately 0.1 micron (μm) to 0.6 μm.

5. The optical signal processor of claim 1 , wherein the first sub-wavelength grating comprises at least one of: glass, silicon or plastic and the second sub-wavelength gratin comprises at least one of class, silicon or plastic.

6. The optical signal processor of claim 1 , wherein at least the first sub-wavelength grating or the second sub-wavelength grating is on a moveable structure.

7. The optical signal processor of claim 6 , wherein one of the first sub-wavelength grating or the second sub-wavelength grating is on a fixed structure.

8. The optical signal processor of claim 6 , wherein the moveable structure comprises a moveable micro-electromechanical structures (MEMS).

9. The optical signal processor of claim 1 , wherein the optical signal processor is a part of a micro-electromechanical structure (MEMS) accelerometer based sensor comprising at least one of: a pressure sensor, a temperature sensor, a strain sensor, a force sensor, a gyroscopic sensor, an acoustic sensor, an ultrasonic sensor, a vibration sensor or a position feedback sensor.

10. The optical signal processor of claim 1 , wherein the optical signal processor is part of a beam scanner.

11. A micro-electromechanical structure (MEMS) accelerometer comprising:
a light source;
an optical signal processor for receiving light emitted from the light source, the optical signal processor comprising:
a first sub-wavelength grating having a first grating period; and
a second sub-wavelength grating having a second grating period that is different than the first grating period of the first sub-wavelength grating; and
a means for detecting a change in a diffracted light intensity of the light emitted from the light source after passing through the optical signal processor.

12. The MEMS accelerometer of claim 11 , wherein the first grating period and the second grating period are less than a wavelength of the light source.

13. The MEMS accelerometer of claim 11 , further comprising:
a gap between the first sub-wavelength grating and the second sub-wavelength grating.

14. The MEMS accelerometer of claim 11 , wherein the first sub-wavelength grating comprises at least one of: glass, silicon or plastic and the second sub-wavelength grating comprises at least one of: glass, silicon or plastic.

15. The MEMS accelerometer of claim 11 , wherein at least the first sub-wavelength grating or the second sub-wavelength grating is on a moveable structure.

16. The MEMS accelerometer of claim 15 , wherein one of the first sub-wavelength grating or the second sub-wavelength grating is on a fixed structure.

17. A laser beam scanner comprising:
a light source;
an optical signal processor for tuning light emitted from the light source, the optical signal processor comprising:
a first sub-wavelength grating having a first grating period; and
a second sub-wavelength grating having a second grating period that is different than the first grating period of the first sub-wavelength grating, wherein the first grating period and the second grating periods are less than the wavelength of the light source and at least one of the first and second sub-wavelength gratings are transparent to the light source; and
a beam block blocking a light component of the light source.

18. The laser beam scanner of claim 17 , further comprising:
a micro-electromechanical structure (MEMS) actuator to stretch the second sub-wavelength grating to tune the light emitted from the light source.

Assignees

• Samson Scott
• Kedia Sunny
• Rogers Al-Aakhir
• Stanford Res Inst Int

Inventors

• Samson Scott
• Kedia Sunny
• Rogers Al-Aakhir

Classifications

• G02B5/1809 Primary

  with pitch less than or comparable to the wavelength · CPC title

• G01P15/093

  by photoelectric pick-up · CPC title

• G02B27/4277

  being separated by an air space · CPC title

• G02B26/0808

  by means of one or more diffracting elements · CPC title

• G02B26/106

  having diffraction gratings as scanning elements, e.g. holographic scanners (holographic optical elements G02B5/32, holography G03H) · CPC title