Dual beam non-contact displacement sensor

Patent metadata

Field	Value
Publication number	US-9228878-B2
Application number	US-201213424262-A
Country	US
Kind code	B2
Filing date	Mar 19, 2012
Priority date	Mar 19, 2012
Publication date	Jan 5, 2016
Grant date	Jan 5, 2016

Abstract

This disclosure describes systems, methods, and apparatus for remotely monitoring an elevation, or change in elevation, of a fluid surface, such as that of molten sapphire. The remote monitoring can be performed by measuring positions of a pair of reflected laser beams off the fluid surface as detected on an imaging sensor. As the surface elevation falls, the positions of the pair of reflected laser beams move relative to each other, and this positional change can be converted into a change in the fluid surface elevation.

First claim

What is claimed is:

1. A remote displacement sensing system for fluid level measurement, the system comprising:
a one-dimensional imaging sensor;
a first laser source directed to a fluid surface within a furnace such that a first reflected beam is detected by the one-dimensional imaging sensor at a first position;
a second laser source directed to the fluid surface within the furnace such that a second reflected beam is detected by the one-dimensional imaging sensor at a second position; and
a processor configured to monitor a distance between the first and second positions and to calculate a change in a level of the fluid based on a change in the distance between the first and second positions,
wherein from a viewpoint perpendicular to a plane passing vertically through the one-dimensional imaging sensor, the first and second reflected beams intersect.

2. The remote displacement sensing system of claim 1 , wherein the first laser source and the second laser source produce beams having cross sections with substantially greater length than width.

3. The remote displacement sensing system of claim 2 , wherein a length of the beam cross sections of the first and second laser sources is perpendicular to the one-dimensional imaging sensor.

4. The remote displacement sensing system of claim 1 , wherein the first and second laser sources are synchronously pulsed, and maintained in an on state for a same pulse length.

5. The remote displacement sensing system of claim 4 , wherein the one-dimensional imaging sensor has a detection integration period longer than the pulse length.

6. The remote displacement sensing system of claim 5 , wherein the one-dimensional imaging sensor is pulsed asynchronously with the first and second laser sources.

7. The remote displacement sensing system of claim 1 , wherein one or more filters in series between the fluid surface and the one-dimensional imaging sensor have a bandpass including 450 or 500 nanometer wavelengths.

8. The remote displacement sensing system of claim 1 , wherein the one-dimensional imaging sensor has a faster data acquisition rate than a two-dimensional imaging sensor.

9. The remote displacement sensing system of claim 1 , wherein the first and second laser sources operate below a 500 nanometer wavelength.

10. The remote displacement sensing system of claim 9 , wherein the first and second laser sources operate below a 450 nanometer wavelength.

11. The remote displacement sensing system of claim 1 , wherein the processor is configured to calculate a change in the level, Δ 626 , of the fluid based on the following equation:

Δ
626

=

x
2

-

x
1

4
⁢

⁢

tan
⁡

(
∅
)

where x 2 -x 1 is the change in the distance between the first and second positions and Ø is an angle between either of the first or second laser sources and the fluid surface when undisturbed.

12. The remote displacement sensing system of claim 11 , wherein the angle θ is between 0.5° and 1.5°.

13. The remote displacement sensing system of claim 1 , wherein the fluid is selected from the group consisting of: sapphire, silicon, silicon carbide, and glass.

14. A method of performing remote displacement sensing of a fluid surface, the method comprising:
directing a first laser beam to pass through a view corridor of a furnace, reflect off a fluid surface inside the furnace, and return through the view corridor;
directing a second laser beam to pass through the view corridor of the furnace, reflect off the fluid surface of the inside of the furnace, and return through the view corridor;
measuring, via at least one imaging sensor, a first average distance between the first and second laser beams during a first time period;
measuring, via the at least one imaging sensor, a second average distance between the first and second laser beams during a second time period;
calculating, via a processor, a difference between the first and second average distances; and
determining, via the processor, a change in elevation of the fluid surface as a function of the difference,
wherein from a viewpoint perpendicular to a plane passing vertically through the imaging sensor, the first and second laser beams cross.

15. The method of performing remote displacement sensing of a fluid surface of claim 14 , wherein the view corridor is at least 1 meter from the fluid surface.

16. The method of performing remote displacement sensing of a fluid surface of claim 15 , wherein an angle of incidence of the first laser beam on the fluid surface is less than 1.5°.

17. The method of performing remote displacement sensing of a fluid surface of claim 16 , wherein an angle of incidence of the first laser beam on the fluid surface is between 0.5° and 1.5°.

18. The method of performing remote displacement sensing of a fluid surface of claim 14 , wherein a resolution of the change in elevation increases with increasing angle of incidence.

19. The method of performing remote displacement sensing of a fluid surface of claim 14 , further comprising synchronously pulsing the first and second laser beams.

20. The method of performing remote displacement sensing of a fluid surface of claim 19 , wherein the measuring is periodically performed for discrete periods of time.

21. The method of performing remote displacement sensing of a fluid surface of claim 20 , wherein the pulsing has a shorter duty cycle than the measuring.

22. The method of performing remote displacement sensing of a fluid surface of claim 21 , wherein the measuring and the pulsing are asynchronous.

23. The method of performing remote displacement sensing of a fluid surface of claim 14 , wherein the imaging sensor is one-dimensional.

24. The method of performing remote displacement sensing of a fluid surface of claim 14 , wherein the first and second laser beams have cross sections with substantially greater length than width.

25. The method of performing remote displacement sensing of a fluid surface of claim 24 , wherein the first and second laser beam cross sections are parallel.

26. The method of performing remote displacement sensing of a fluid surface of claim 25 , wherein the length dimension of each of the first and second laser beams is substantially perpendicular to a length of a one-dimensional imagining sensor, where the imaging sensor enables the first and second measuring.

27. The method of performing remote displacement sensing of a fluid surface of claim 14 , wherein a reflection of the first and second laser beams off the fluid surface is primarily specular.

28. A remote displacement sensing system comprising:
an imaging sensor having

Assignees

• Haw Thomas
• Kercheck Gary
• Advanced Energy Ind Inc

Inventors

• Haw Thomas
• Kercheck Gary

Classifications

• G01F23/292 Primary

  Light {, e.g. infrared or ultraviolet} · CPC title