Depositing apparatus and method for manufacturing organic light emitting diode display using the same

Patent metadata

Field	Value
Publication number	US-9227203-B2
Application number	US-201313955322-A
Country	US
Kind code	B2
Filing date	Jul 31, 2013
Priority date	Oct 9, 2012
Publication date	Jan 5, 2016
Grant date	Jan 5, 2016

Abstract

A deposition apparatus includes a deposition source that receives a deposition material, and a plurality of spray nozzles arranged in a first direction at one side of the deposition source to spray the deposition material to a facing substrate. The deposition source includes a center area and outer areas, the outer areas being at respective ends of the center area with reference to the first direction. The spray nozzles include first spray nozzles arranged in each outer area and extending outwardly from the deposition source, a surface forming an end of the first spray nozzles forming a first inclination angle with a substrate surface in the first direction.

First claim

What is claimed is:

1. A deposition apparatus, comprising:
a deposition source that receives a deposition material; and
a plurality of spray nozzles arranged in a first direction at one side of the deposition source to spray the deposition material to a facing substrate,
wherein:
the deposition source includes a center area and outer areas, the outer areas being at respective ends of the center area with reference to the first direction,
the spray nozzles include first spray nozzles arranged in each outer area and extending outwardly from the deposition source, the first spray nozzles each being inclined away from the center area, a surface forming an end of the first spray nozzles forming a first inclination angle with a substrate surface in the first direction,
a center of the substrate in the first direction and a center of the deposition source in the first direction are aligned,
the center area of the deposition source has a length in the first direction satisfying a condition as follows:

L
1

=

2
⁢
T

tan
⁢

⁢
θ

-

L
2

wherein L1 is the length of the center area in the first direction, L2 is a deposition area length of the substrate in the first direction, T is a distance between the substrate and an end of the spray nozzles, and θ is the first inclination angle,
second spray nozzles arranged at the center area extend from the deposition source such that a surface forming an end of the second spray nozzles has a second inclination angle in the first direction with respect to the substrate surface, and
the second inclination angle is smaller than the first inclination angle.

2. A deposition apparatus, comprising:
a deposition source that receives a deposition material; and
a plurality of spray nozzles arranged in a first direction at one side of the deposition source to spray the deposition material to a facing substrate,
wherein:
the deposition source includes a center area and outer areas, the outer areas being at respective ends of the center area with reference to the first direction,
the spray nozzles include first spray nozzles arranged in each outer area and extending outwardly from the deposition source, a surface forming an end of the first spray nozzles forming a first inclination angle with a substrate surface in the first direction,
a center of the substrate in the first direction and a center of the deposition source in the first direction are aligned,
the center area of the deposition source has a length in the first direction satisfying a condition as follows:

L
1

=

2
⁢
T

tan
⁢

⁢
θ

-

L
2

wherein L1 is the length of the center area in the first direction, L2 is a deposition area length of the substrate in the first direction, T is a distance between the substrate and an end of the spray nozzles, and θ is the first inclination angle,
second spray nozzles arranged at the center area extend from the deposition source such that a surface forming an end of the second spray nozzles has a second inclination angle in the first direction with respect to the substrate surface, and
the second inclination angle is smaller than the first inclination angle.

3. The deposition apparatus as claimed in claim 2 , wherein
the first inclination angle is in a range of 43-53 degrees.

4. The deposition apparatus as claimed in claim 2 , wherein
the first inclination angle is in a range of 25-35 degrees.

5. The deposition apparatus as claimed in claim 2 , wherein
the first spray nozzles are symmetrically arranged in the first direction with reference to a center of the deposition source.

6. A method of manufacturing an organic light emitting diode (OLED) display, the method comprising:
providing a deposition apparatus including a deposition source receiving a deposition material and a plurality of spray nozzles arranged in a first direction at one side of the deposition source to spray the deposition material to a substrate;
disposing the substrate to face the spray nozzles; and
spraying the deposition material through the spray nozzles while moving the deposition source in a second direction crossing the first direction,
wherein:
the deposition source includes a center area and outer areas, the outer areas being at respective ends of the center area with reference to the first direction,
first spray nozzles arranged in each outer area spray the deposition material from the deposition source at a first inclination angle in the first direction,
a center of the substrate in the first direction and a center of the deposition source in the first direction are aligned,
the center area of the deposition source has a length in the first direction satisfying a condition as follows:

L
1

=

2
⁢
T

tan
⁢

⁢
θ

-

L
2

wherein L1 is the length of the center area in the first direction, L2 is a deposition area length of the substrate in the first direction, T is a distance between the substrate and an end of the spray nozzles, and θ is the first inclination angle,
second spray nozzles arranged at the center area extend from the deposition source such that a surface forming an end of the second spray nozzles has a second inclination angle in the first direction with respect to the substrate surface, and
the second inclination angle is smaller than the first inclination angle.

7. The method as claimed in claim 6 , wherein
the first spray nozzles include a surface forming an end thereof, the surface being inclined in an outside direction with respect to a substrate surface while having the first inclination angle in the first direction.

8. The method as claimed in claim 7 , wherein
the first inclination angle is in a range of 43-53 degrees.

9. The method as claimed in claim 7 , wherein
the first inclination angle is in a range of 25-35 degrees.

10. The me

Assignees

• Lee Sang-Shin
• Samsung Display Co Ltd

Inventors

• Lee Sang-Shin

Classifications

• C23C14/243

  Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title

• B05B1/14 Primary

  with multiple outlet openings (B05B1/02, B05B1/26 take precedence); with strainers in or outside the outlet opening · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• C23C14/042 Primary

  using masks · CPC title

• H01L51/56

  Electricity · mapped topic