Magnetic recording medium and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-9224413-B2
Application number	US-201313940763-A
Country	US
Kind code	B2
Filing date	Jul 12, 2013
Priority date	Mar 22, 2013
Publication date	Dec 29, 2015
Grant date	Dec 29, 2015

Abstract

According to one embodiment, a magnetic recording medium including a substrate and a magnetic recording layer formed on the substrate and including a plurality of projections is obtained. The array of the plurality of projections includes a plurality of domains in which the projections are regularly arranged, and a boundary region between the domains, in which the projections are irregularly arranged. The boundary region is formed along a perpendicular bisector of a line connecting the barycenters of adjacent projections.

First claim

What is claimed is:

1. A magnetic recording medium manufacturing method comprising:
forming a magnetic recording layer on a substrate;
forming a mask layer on the magnetic recording layer;
forming projecting patterns on the mask layer;
transferring the projecting patterns to the mask layer;
etching the magnetic recording layer through the mask layer having the projecting patterns; and
removing the mask layer,
the etching performed under a condition which meets an expression (1) below to form the magnetic recording layer including a plurality of projections having a shape combining a circular truncated conical shape as a vertex region, and a truncated polygonal conical shape as a bottom region:
X>Z −2 Y /tan θ  (1)

wherein X (nm) is a diameter of the projecting patterns of the mask layer, Y (nm) is an etching depth of the magnetic recording layer, Z (nm) is a dot pitch of the projecting patterns of the mask layer, and θ is a taper angle of a side surface of the projection with respect to a bottom surface thereof.

2. The method according to claim 1 , wherein the forming the projecting patterns on the mask layer is performed by forming a self-organization film on the mask layer, causing micro phase separation in the self-organization film, leaving a dot-shaped phase behind, and removing the other phase.

Assignees

• Toshiba Kk

Inventors

• Kimura Kaori
• Takizawa Kazutaka
• Watanabe Akira
• Iwasaki Takeshi
• Takeo Akihiko

Classifications

• G11B5/855

  Coating only part of a support with a magnetic layer · CPC title

• G11B5/84

  Processes or apparatus specially adapted for manufacturing record carriers · CPC title

• G11B5/746 Primary

  Bit Patterned record carriers, wherein each magnetic isolated data island corresponds to a bit · CPC title

• G11B5/743 Primary

  Patterned record carriers, wherein the magnetic recording layer is patterned into magnetic isolated data islands, e.g. discrete tracks · CPC title