Fabrication of tunneling junction for nanopore DNA sequencing

Patent metadata

Field	Value
Publication number	US-9222930-B2
Application number	US-201313971532-A
Country	US
Kind code	B2
Filing date	Aug 20, 2013
Priority date	Apr 18, 2013
Publication date	Dec 29, 2015
Grant date	Dec 29, 2015

Abstract

A mechanism is provided for forming a nanodevice. A reservoir is filled with a conductive fluid, and a membrane is formed to separate the reservoir in the nanodevice. The membrane includes an electrode layer having a tunneling junction formed therein. The membrane is formed to have a nanopore formed through one or more other layers of the membrane such that the nanopore is aligned with the tunneling junction of the electrode layer. The tunneling junction of the electrode layer is narrowed to a narrowed size by electroplating or electroless deposition. When a voltage is applied to the electrode layer, a tunneling current is generated by a base in the tunneling junction to be measured as a current signature for distinguishing the base. When an organic coating is formed on an inside surface of the tunneling junction, transient bonds are formed between the electrode layer and the base.

First claim

What is claimed is:

1. A method of forming a nanodevice, the method comprising:
filing a reservoir with a conductive fluid;
forming a membrane to separate the reservoir in the nanodevice, the membrane including an electrode layer having a tunneling junction formed therein; and
forming the membrane to have a nanopore formed through one or more other layers of the membrane such that the nanopore is aligned with the tunneling junction of the electrode layer;
wherein the tunneling junction is formed in the electrode layer by: patterning the electrode layer with two boxes connected by a metal strip of the electrode layer, coating an electron beam resist on top of the electrode layer, opening a gap shaped window through the electron beam resist to make a portion of the metal strip visible through the gap shaped window of the electron beam resist, etching away the portion of the metal strip that was visible through the gap shaped window of the electron beam resist, and removing the electron beam resist resulting in the electrode layer having the tunneling junction where the portion of the metal strip was etched away;
wherein when a voltage is applied to the electrode layer, a tunneling current is generated by a base in the tunneling junction to be measured as a current signature for distinguishing the base; and
wherein when an organic coating is formed on an inside surface of the tunneling junction, transient bonds are formed between the electrode layer and the base.

2. The method of claim 1 , wherein etching away the portion of the metal strip that was visible through the gap shaped window of the electron beam resist is by reactive ion etching.

3. The method of claim 1 , wherein the electrode layer underneath the electron beam resist remains and is not etched away.

4. The method of claim 1 , wherein the electron beam resist is polymethyl methacrylate (PMMA).

5. The method of claim 1 , wherein opening the gap shaped window through the electron beam resist to make the portion of the metal strip visible through the gap shaped window of the electron beam resist is by electron beam lithography.

6. The method of claim 1 , further comprising narrowing the tunneling junction of the electrode layer to a narrowed size by electroplating or electroless.

7. The method of claim 1 , wherein material of the electrode layer includes at least one of gold, palladium, platinum, titanium nitride, ruthenium, dope zinc oxide, indium tin oxide, tungsten, aluminum, and copper.

8. A method of forming a nanodevice, the method comprising:
filing a reservoir with a conductive fluid;
forming a membrane to separate the reservoir in the nanodevice, the membrane including an electrode layer having a tunneling junction formed therein; and
forming the membrane to have a nanopore formed through one or more other layers of the membrane such that the nanopore is aligned with the tunneling junction of the electrode layer;
wherein the tunneling junction is formed in the electrode layer by:
coating an electron beam resist on top of a substrate;
opening a first window having a first elongated extension;
opening a second window having a second elongated extension in which a portion of the electron beam resist separates the first elongated extension from the second elongated extension;
depositing metal of the electrode layer to cover the electron beam resist, to cover the first window having the first elongated extension, and to cover the second window having the second elongated extension; and
removing the metal having been in contact with the electron beam resist so as to leave the electrode layer having the tunneling junction in a pattern of the first window having the first elongated extension and in the pattern of the second window having the second elongated extension, where the tunneling junction is formed and located where the portion of the electron beam resist was removed;
wherein when a voltage is applied to the electrode layer, a tunneling current is generated by a base in the tunneling junction to be measured as a current signature for distinguishing the base; and
wherein when an organic coating is formed on an inside surface of the tunneling junction, transient bonds are formed between the electrode layer and the base.

9. The method of claim 8 , further comprising narrowing the tunneling junction of the electrode layer to a narrowed size by electroplating or electroless; and
wherein material of the electrode layer includes at least one of gold, palladium, platinum, titanium nitride, ruthenium, dope zinc oxide, indium tin oxide, tungsten, aluminum, and copper.

Assignees

• IBM
• Globalfoundries Inc

Inventors

• Peng Hongbo
• Rossnagel Stephen M
• Royyuru Ajay K
• Stolovitzky Gustavo A
• Wang Deqiang

Classifications

• G01N33/48721 Primary

  Investigating individual macromolecules, e.g. by translocation through nanopores (Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68) · CPC title

• C25D3/50

  of platinum group metals · CPC title

• C23C18/1644

  porous substrates · CPC title

• C25D21/12

  Process control or regulation (controlling or regulating in general G05) · CPC title

• C23C18/42

  Coating with noble metals · CPC title