Method of forming nanocrystals and method of manufacturing an organic light-emitting display apparatus including a thin film having nanocrystals

Patent metadata

Field	Value
Publication number	US-9219254-B2
Application number	US-201313975259-A
Country	US
Kind code	B2
Filing date	Aug 23, 2013
Priority date	Apr 26, 2013
Publication date	Dec 22, 2015
Grant date	Dec 22, 2015

Abstract

A method of forming nanocrystals includes loading a substrate into a chamber, applying a first voltage to a first target to form a thin film including a first metal compound on the substrate by sputtering, and applying a second voltage to a second target and forming nanocrystals in the thin film by sputtering.

First claim

What is claimed is:

1. A method of forming nanocrystals, the method comprising:
loading a substrate into a chamber;
applying a first voltage to a first target to form a thin film comprising a first metal compound on the substrate by sputtering;
after forming the thin film, applying a second voltage to a second target and forming nanocrystals in the thin film by sputtering; and
wherein the second voltage is higher than the first voltage.

2. The method of claim 1 , wherein the first target and the second target comprise different metals.

3. The method of claim 1 , wherein the first metal compound is a metal oxide or a metal nitride.

4. The method of claim 1 , wherein a diameter of the nanocrystals is determined by a value of the voltage applied to the second target.

5. The method of claim 1 , wherein the forming of the nanocrystals comprises doping the thin film with a second metal compound from the second target.

6. The method of claim 5 , wherein a density of the nanocrystals is determined by a doping amount of the second metal compound.

7. The method of claim 1 , wherein the first metal compound is amorphous.

8. The method of claim 1 , wherein a thickness of the thin film is about 100 nm or less.

9. The method of claim 1 , wherein a process temperature in the chamber is about 100° C. or less.

10. The method of claim 1 , wherein a density of the thin film is increased by the formation of the nanocrystals.

11. The method of claim 1 , wherein optical bandgap energy of the thin film is increased by the formation of the nanocrystals.

12. The method of claim 1 , wherein the nanocrystals are formed by crystallization of at least one metal of the first metal compound and a second metal compound from the second target.

13. The method of claim 1 , wherein the first metal compound comprises at least one of SnO x , ZnO, TiO x , indium tin oxide (ITO), and WO x .

14. A thin film having nanocrystals formed by the method of forming nanocrystals of claim 1 .

15. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
loading a substrate comprising at least some components of the organic light-emitting display apparatus into a chamber;
applying a first voltage to a first target to form a thin film comprising a first metal compound on the substrate by sputtering;
after forming the thin film, applying a second voltage to a second target and forming nanocrystals in the thin film by sputtering; and
wherein the second voltage is higher than the first voltage.

16. The method of claim 15 , wherein the organic light-emitting display apparatus comprises: a first electrode; an intermediate layer comprising an organic light-emitting layer; a second electrode; and an encapsulation layer; the electrodes and layers being on the substrate and
the thin film having the nanocrystals formed therein is included in the encapsulation layer.

17. The method of claim 16 , wherein the encapsulation layer comprises an organic layer and an inorganic layer.

18. The method of claim 17 , wherein the inorganic layer comprises the thin film comprising the nanocrystals.

19. The method of claim 15 , wherein the thin film is amorphous.

Assignees

• Samsung Display Co Ltd

Inventors

• Huh Myung-Soo
• Jung Suk-Won
• Kang Tae-Wook

Classifications

• C23C14/3464

  using more than one target (C23C14/56 takes precedence) · CPC title

• C23C14/08

  Oxides (C23C14/10 takes precedence) · CPC title

• C23C14/352

  using more than one target (C23C14/56 takes precedence) · CPC title

• H10K59/873

  Encapsulations · CPC title

• H10K71/00 Primary

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title