Method of using an EUV mask during EUV photolithography processes

Patent metadata

Field	Value
Publication number	US-9217923-B2
Application number	US-201514711377-A
Country	US
Kind code	B2
Filing date	May 13, 2015
Priority date	Nov 15, 2013
Publication date	Dec 22, 2015
Grant date	Dec 22, 2015

Abstract

The present disclosure is directed to various masks for use during EUV photolithography processes. In one example, an EUV mask is disclosed that includes, among other things, a substrate, a multilayer stack comprised of a plurality of multilayer pairs of ruthenium and silicon formed above the substrate, wherein the mask is adapted to, when irradiated with EUV light, have an effective reflective plane that is positioned 32 nm or less below an uppermost surface of the multilayer stack and a capping layer positioned above the uppermost surface of the multilayer stack.

First claim

What is claimed:

1. A method, comprising:
positioning an EUV mask in a photolithography system, wherein said EUV mask is comprised of a multilayer stack comprised of a plurality of multilayer pairs of ruthenium and silicon, wherein said multilayer stack has an uppermost surface and wherein said mask is adapted to, when irradiated with light having a wavelength of 20 nm or less, have an effective reflective plane that is positioned 32 nm or less below said uppermost surface of said multilayer stack;
directing an EUV light having a wavelength of 20 nm or less toward said EUV mask; and
irradiating a first layer of light sensitive material positioned above a first substrate with a portion of said EUV light that reflects off of said EUV mask.

2. The method of claim 1 , further comprising, after irradiating said first layer of light sensitive material, removing said first substrate and positioning a second substrate having a second layer of light sensitive material formed there above, and performing the steps recited in claim 1 on said second layer of light sensitive material.

3. The method of claim 1 , wherein said EUV light has a wavelength of about 13.5 nm.

4. The method of claim 1 , wherein each of said layers of ruthenium in said multilayer stack has a thickness that falls within a range of about 2.5-3.6 nm and wherein each of said layers of silicon in said multilayer stack has a thickness that falls within a range of about 3.6-4.8 nm.

5. A method, comprising:
positioning an EUV mask in a photolithography system, wherein said EUV mask is comprised of a multilayer stack comprised of a plurality of multilayer pairs of ruthenium and silicon, wherein said multilayer stack has an uppermost surface and wherein said mask is adapted to, when irradiated with light having a wavelength of 20 nm or less, have an effective reflective plane that is positioned 32 nm or less below said uppermost surface of said multilayer stack, and wherein each of said layers of ruthenium in said multilayer stack has a thickness that falls within a range of about 2.5-3.6 nm and wherein each of said layers of silicon in said multilayer stack has a thickness that falls within a range of about 3.6-4.8 nm;
directing an EUV light having a wavelength of 20 nm or less toward said EUV mask; and
irradiating a first layer of light sensitive material positioned above a first substrate with a portion of said EUV light that reflects off of said EUV mask.

6. The method of claim 5 , further comprising, after irradiating said first layer of light sensitive material, removing said first substrate and positioning a second substrate having a second layer of light sensitive material formed there above, and performing the steps recited in claim 5 on said second layer of light sensitive material.

7. The method of claim 6 , wherein said EUV light has a wavelength of about 13.5 nm.

Assignees

• Globalfoundries Inc

Inventors

• Singh Mandeep

Classifications

• H10P76/405

  characterised by their composition, e.g. multilayer masks · CPC title

• G03F7/2004

  characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light · CPC title

• G03F7/20 Primary

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• G03F1/48

  Protective coatings · CPC title

• G03F1/24 Primary

  Reflection masks; Preparation thereof · CPC title