Imprinting apparatus, imprinting method, and manufacturing method of uneven plate

Patent metadata

Field	Value
Publication number	US-9216539-B2
Application number	US-201414459354-A
Country	US
Kind code	B2
Filing date	Aug 14, 2014
Priority date	Feb 15, 2011
Publication date	Dec 22, 2015
Grant date	Dec 22, 2015

Abstract

According to one embodiment, an imprinting apparatus includes an ejecting unit, a stage, a moving unit, and an observation unit. The ejecting unit ejects and drips a hardening resin material onto a substrate to be processed. The substrate to be processed is placed onto the stage. The moving unit relatively moves the ejecting unit and the stage. The observation unit observes the dripped hardening resin material and the pattern with the state in which the dripped hardening resin material and the pattern are overlaid on a plane, before the template is brought into contact with the hardening resin material.

First claim

What is claimed is:

1. An imprinting method in which a hardening resin material is dripped onto a substrate to be processed, and a pattern that is formed to have irregularities on a template is transferred onto the hardening resin material dripped onto the substrate to be processed, the imprinting method comprising:
ejecting and dripping the hardening resin material onto the substrate to be processed from an ejecting unit;
moving relatively a stage on which the substrate to be…

Assignees

• Toshiba Kk

Inventors

• Ota Takumi

Classifications

• H10P76/00

  Electricity · mapped topic

• B82Y40/00

  Operations & Transport · mapped topic

• B05D3/12

  Operations & Transport · mapped topic

• B29C59/02 Primary

  Operations & Transport · mapped topic

• Y10S977/887

  Cross-Sectional Technologies · mapped topic