Sensing circuit of a micro-electromechanical sensor
US-2024345125-A1 · Oct 17, 2024 · US
US9215519B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9215519-B2 |
| Application number | US-84768210-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 30, 2010 |
| Priority date | Jul 30, 2010 |
| Publication date | Dec 15, 2015 |
| Grant date | Dec 15, 2015 |
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Official abstract text for this publication.
A microphone system has a chip system coupled to a base. Among other things, the chip system includes a microphone chip and a circuit chip, in a stacked relationship, configured to electrically communicate. The microphone chip has a diaphragm configured to move upon receipt of an incident audio signal, while the circuit chip has at least one through hole audibly coupled with the diaphragm of the microphone chip.
Opening claim text (preview).
What is claimed is: 1. A microphone system comprising: a base; a chip system coupled to the base, the chip system comprising a microphone chip and a circuit chip in a stacked relationship, the circuit chip having a body, the circuit chip and microphone chip being configured to electrically communicate, the microphone chip having a diaphragm configured to move, relative to the backplate, upon receipt of an incident audio signal, the backplate having a plurality of backp…
Electricity · mapped topic
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