MEMS gyroscopes with reduced errors

US9212908B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9212908-B2
Application numberUS-201213456706-A
CountryUS
Kind codeB2
Filing dateApr 26, 2012
Priority dateApr 26, 2012
Publication dateDec 15, 2015
Grant dateDec 15, 2015

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Abstract

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In comb drive vibratory gyroscopes, drive-induced Coriolis accelerometer offset is effectively canceled by demodulating the output during equal times of in-phase and anti-phase drive of the shuttle with respect to the velocity signal used for angular rate demodulation. This reduces or eliminates the corresponding thermal and die-stress effects otherwise needing calibration.

First claim

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What is claimed is: 1. A method of operating vibratory gyroscope having a shuttle and a Coriolis accelerometer, the method comprising: driving, by a first shuttle driver, vibratory motion of the shuttle using a drive signal having alternating phase and anti-phase drive signal periods; and demodulating, by a demodulator, output of the Coriolis accelerometer during equal times of phase and anti-phase drive of the shuttle with respect to a velocity signal used for angular rate de…

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What does patent US9212908B2 cover?
In comb drive vibratory gyroscopes, drive-induced Coriolis accelerometer offset is effectively canceled by demodulating the output during equal times of in-phase and anti-phase drive of the shuttle with respect to the velocity signal used for angular rate demodulation. This reduces or eliminates the corresponding thermal and die-stress effects otherwise needing calibration.
Who is the assignee on this patent?
Geen John A, Chang John F, Analog Devices Inc
What technology area does this patent fall under?
Primary CPC classification G01C19/5719. Mapped technology areas include Physics.
When was this patent published?
Publication date Tue Dec 15 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).