Method and apparatus for generating plasma pulses

Patent metadata

Field	Value
Publication number	US-9210792-B2
Application number	US-201313746784-A
Country	US
Kind code	B2
Filing date	Jan 22, 2013
Priority date	Jan 23, 2012
Publication date	Dec 8, 2015
Grant date	Dec 8, 2015

Abstract

A method and apparatus generates pulses that can be used for high-precision three-dimensional plasma treatment. At least two sources are furnished with at least one time function, wherein each of the at least two sources radiates an electromagnetic field generated by one of the time functions, and the at least one time function. In a method, the at least two sources cooperate in such a manner that at least one predetermined field strength is realized sequentially in a temporal succession in at least two predetermined space-time points. An alternative method uses at least one source and at least one reflection element. An apparatus with at least two sources and at least one data processing device or at least one source, at least one reflection element and at least one data processing device is configured such that one of the methods can be executed.

First claim

The invention claimed is:

1. A method for generating plasma pulses, wherein
at least two sources of which each is furnished with at least one corresponding time function, wherein
each of the at least two sources radiates an electromagnetic field generated by the at least one corresponding time function, and
the at least one corresponding time functions and the at least two sources cooperate in such a manner that a constructive temporal and spatial superposition of the radiated electromagnetic fields of at least one predetermined field strength is realized sequentially in a temporal succession in at least two predetermined space-time points, wherein the at least two predetermined space-time points correspond to different locations in three dimensional space.

2. The method according to claim 1 , wherein the at least one predetermined space-time point is reached by at least one of the time functions on at least two different propagation paths.

3. The method according to claim 1 , wherein the predetermined space-time points form a one-, two- or three-dimensional structure.

4. The method according to claim 1 , wherein at least one time function is determined by outputting a predetermined pulse in a space point and recording said pulse as a pulse response in the places of the at least two sources.

5. The method according to claim 1 , wherein at least one source is furnished with the time-inverted pulse response.

6. A method for generating plasma pulses, wherein
at least one source is furnished with a time function, wherein
the at least one source radiates an electromagnetic field generated by the time function and
the time function, the at least one source and at least one reflection element cooperate in such a manner that, by constructive temporal and spatial superposition of reflected parts of the radiated electromagnetic field upon the electromagnetic field, at least one predetermined field strength is realized sequentially in a temporal succession in at least two predetermined space-time points, wherein the at least two predetermined space-time points correspond to different locations in three dimensional space.

7. The method according to claim 6 , wherein the predetermined space-time points form a one-, two- or three-dimensional structure.

8. The method according to claim 6 , wherein at least one time function is determined by outputting a predetermined pulse in a space point and recording said pulse as a pulse response in the places of the at least two sources.

9. The method according to claim 6 , wherein at least one source is furnished with the time-inverted pulse response.

Assignees

• Forschungsverbund Berlin Ev

Inventors

• Gesche Roland

Classifications

• H05H1/48

  using an arc (H05H1/26 takes precedence) · CPC title

• H05H1/46 Primary

  using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/26 takes precedence) · CPC title

• H01J37/3222

  Antennas · CPC title

• H01J37/32293 Primary

  using particular waveforms, e.g. polarised waves · CPC title

• H01J2237/327

  Arrangements for generating the plasma · CPC title