Waveguide, Wave Beam Adjusting Device, Wave Beam Adjusting Method and Manufacturing Method
US-2024387973-A1 · Nov 21, 2024 · US
US9207399B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9207399-B2 |
| Application number | US-201313751492-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 28, 2013 |
| Priority date | Jan 28, 2013 |
| Publication date | Dec 8, 2015 |
| Grant date | Dec 8, 2015 |
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Embodiments of the invention describe systems, apparatuses and methods for providing athermicity and a tunable spectral response for optical filters. Finite impulse response (FIR) filters are commonly implemented in photonic integrated circuits (PICs) to make devices such as wavelength division multiplexing (WDM) devices, asymmetric Mach-Zehnder interferometers (AMZIs) and array waveguide gratings (AWGs). Athermicity of an FIR filter describes maintaining a consistent frequency transmission spectrum as the ambient temperature changes. A tunable spectral response for an FIR filter describes changing the spectrum of an FIR filter based on its application, as well as potentially correcting for fabrication deviations from the design. In addition, embodiments of the invention reduce energy dissipation requirements and control complexity compared to prior art solutions.
Opening claim text (preview).
The invention claimed is: 1. An optical device comprising: an input port; an output port; a plurality of waveguides coupled to the input port and the output port, the plurality of waveguides including a first optical waveguide comprising: a first waveguide section, wherein the first waveguide section has an optical wavelength response as a function of an ambient temperature of the optical device; and a second waveguide section, wherein the second waveguide section is to have an operating temperature that is fixed and greater than the ambient temperature of the optical device; at least one heating element to heat the second waveguide section of the first waveguide; a temperature sensor to measure the temperature of the second waveguide section; and a temperature controller to control the heating element(s) based, at least in part, on the temperature sensor so that the temperature of the second waveguide section is fixed and greater than the ambient temperature of the optical device. 2. The optical device of claim 1 , wherein the plurality of waveguides coupled to the input port and the output port further comprises: a second optical waveguide comprising a third and a fourth waveguide section; wherein the third waveguide section of the second optical waveguide has an optical wavelength response as a function of the ambient temperature of the optical device, the heating element(s) to heat both the second waveguide section of the first optical waveguide and the fourth waveguide section of the second optical waveguide, and the temperature controller to control the heating element(s) so that the temperature of the second waveguide section of the first optical waveguide and the fourth waveguide section of the second optical waveguide is fixed and greater than the ambient temperature of the optical device. 3. The optical device of claim 2 , wherein the first waveguide section of the first optical waveguide and third waveguide section of the second optical waveguide comprise the same length. 4. The optical device of claim 2 , wherein the length the fourth waveguide section of the second optical waveguide differs from the length of the second waveguide section of the first optical waveguide. 5. The optical device of claim 2 , wherein the heating element(s) consists of a single heating electrode disposed near both of the second waveguide section of the first optical waveguide and the fourth waveguide section of the second optical waveguide. 6. The optical device of claim 2 , wherein the heating element(s) comprises a first and a second heating electrode, the first heating electrode disposed near the second waveguide section of the first optical waveguide, the second heating electrode disposed near the fourth waveguide section of the second optical waveguide, and the temperature controller to independently control each of the first and the second heating electrodes. 7. The optical device of claim 1 , wherein the temperature controller receives control signals to adjust the fixed temperature to change at least one of the frequency of transmission or the filter spectrum of the optical device. 8. The optical device of claim 1 , further comprising a moat having a low thermal conductivity and positioned around the heating element. 9. The optical device of claim 1 , wherein the first optical waveguide is formed, at least partially, from silicon semiconductor material. 10. The optical device of claim 9 , wherein the first optical waveguide is further formed from III-V semiconductor material. 11. The optical device of claim 1 , wherein the first optical waveguide is formed, at least partially, from silicon nitride (SiN) material. 12. The optical device of claim 1 , wherein the first and second waveguide sections of the first waveguide each have a different temperature coefficient of refractive index (dn/dT). 13. The optical device of claim 12 , wherein the material of the second waveguide section of the first waveguide comprises a higher temperature coefficient of refractive index (dn/dT) than the material of the first waveguide section of the first waveguide. 14. The optical device of claim 12 , wherein a width of the second waveguide section of the first waveguide comprises a larger value than a width of the first waveguide section of the first waveguide. 15. The optical device of claim 1 , wherein the plurality of waveguides includes another waveguide having a section comprising a material having a higher temperature coefficient of refractive index (dn/dT) than the material of the first waveguide. 16. The optical device of claim 1 , wherein the optical device comprises one of a WDM device, an AMZI, an interleaver, an AWG, a combination of an FIR and infinite impulse response (IIR) filter. 17. A substrate including a plurality of optical devices, comprising: a first optical device comprising: an input port; an output port; and a plurality of waveguides coupled to the input port and the output port, the plurality of waveguides comprising a first optical waveguide having a first and a second waveguide section, wherein the first waveguide section has an optical wavelength response as a function of an ambient temperature of the system; a second optical device comprising: an input port; an output port; and a plurality of waveguides coupled to the input port and the output port, the plurality of waveguides comprising at least one a second optical waveguide having a third and a fourth waveguide section, wherein the third waveguide section has an optical wavelength response as a function of an ambient temperature of the system; a region including the second waveguide section of the first waveguide of the first optical device and the fourth waveguide section of the second waveguide of the second optical device; a heating element to heat the region; a temperature sensor to measure the temperature of the region; and a temperature controller to control the heating element based, at least in part, on the temperature sensor so that the temperature of the region is fixed and greater than the ambient temperature of the system.
in optical waveguides, not otherwise provided for in this subclass · CPC title
based on thermo-optic effects (G02F1/132 takes precedence) · CPC title
characterised by means for configuring the device, e.g. moveable element for wavelength tuning (switching G02B6/35; thermo-optic devices G02F1/0147) · CPC title
characterised by means for reducing the temperature dependence · CPC title
Temperature control · CPC title
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