Method for testing special pattern and probe card defect in wafer testing
US-2015377951-A1 · Dec 31, 2015 · US
US9207282B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9207282-B2 |
| Application number | US-201313804579-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 14, 2013 |
| Priority date | Mar 14, 2013 |
| Publication date | Dec 8, 2015 |
| Grant date | Dec 8, 2015 |
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Source measure units may operate as a voltage/current (V/I) source for a load, such as a device under test (DUT). Source measure units having a voltage controlled mode and a current controlled mode are described. The source measure units may have a suitable configuration to transition between the voltage controlled mode and current controlled mode in a smooth manner, and may be operated accordingly.
Opening claim text (preview).
What is claimed is: 1. A method of operating a source measure unit (SMU) configured to couple to a load, the SMU operating in a plurality of modes including a voltage-controlled mode and a current-controlled mode, the method comprising: generating a control signal to apply to a control circuit of the SMU when switching between the plurality of modes, wherein generating the control signal comprises combining a first signal, a second signal and a third signal, wherein the first signal is indicative of a voltage error of a voltage across the load relative to a target voltage, wherein the second signal is indicative of a first current error of a current through the load relative to an upper current threshold, and wherein the third signal is indicative of a second current error of the current through the load relative to a lower current threshold. 2. The method of claim 1 , wherein the first signal is indicative of a voltage error of the voltage detected across the load relative to a target voltage of a drive signal of the SMU. 3. The method of claim 1 , wherein combining the first signal, the second signal and the third signal comprises generating a weighted combination of the first signal and the second signal. 4. The method of claim 1 , wherein combining the first signal, the second signal and the third signal comprises generating a weighted combination of the first signal, the second signal, and the third signal. 5. The method of claim 4 , wherein a first weighting factor is associated with the first signal, a second weighting factor is associated with the second signal, and a third weighting factor is associated with the third signal, and wherein a sum of the first weighting factor, the second weighting factor, and the third weighting factor is one. 6. The method of claim 5 , wherein the first weighting factor and/or the second weighting factor and/or the third weighting factor is variable. 7. The method of claim 6 , wherein the first weighting factor and/or second weighting factor and/or third weighting factor is generated by a function. 8. The method of claim 7 , wherein the function is dependent on voltage. 9. The method of claim 8 , wherein the function is dependent on voltage error. 10. The method of claim 7 , wherein the function is dependent on current. 11. The method of claim 10 , wherein the function is dependent on current error. 12. The method of claim 1 , wherein the load is a device under test (DUT). 13. A method of operating a source measure unit (SMU) configured to couple to a load, the SMU operating in a plurality of modes including a voltage-controlled mode and a current-controlled mode, the method comprising: generating a control signal to apply to a control circuit of the SMU when switching between the plurality of modes, wherein generating the control signal comprises combining a first signal, a second signal and a third signal, wherein the first signal is indicative of a first voltage error of a voltage across the load relative to an upper voltage threshold, wherein the second signal is indicative of a current error of a current through the load relative to a target current, and wherein the third signal is indicative of a second voltage error of the voltage across the load relative to a lower voltage threshold. 14. The method of claim 13 , wherein combining the first signal, the second signal and the third signal comprises generating a weighted combination of the first signal, the second signal, and the third signal. 15. The method of claim 14 , wherein a first weighting factor is associated with the first signal, a second weighting factor is associated with the second signal, and a third weighting factor is associated with the third signal, and wherein a sum of the first weighting factor, the second weighting factor, and the third weighting factor is one. 16. The method of claim 15 , wherein the first weighting factor and/or the second weighting factor and/or the third weighting factor is variable. 17. The method of claim 16 , wherein the first weighting factor and/or second weighting factor and/or third weighting factor is generated by a function. 18. The method of claim 17 , wherein the function is dependent on voltage. 19. The method of claim 18 , wherein the function is dependent on voltage error. 20. The method of claim 17 , wherein the function is dependent on current. 21. The method of claim 20 , wherein the function is dependent on current error. 22. A source measure unit (SMU) configured to operate in a plurality of modes including a voltage-controlled mode and a current-controlled mode, the SMU comprising: combination circuitry configured to generate, when the SMU transitions between the voltage-controlled mode and the current controlled mode, a control signal to provide to a control circuit of the SMU, the control signal being generated by combining a first signal, a second signal and a third signal, wherein the first signal is indicative of a voltage error of a voltage relative to a target voltage, wherein the second signal is indicative of a first current error of a current relative to an upper current threshold, and wherein the third signal is indicative of a second current error of the current relative to a lower current threshold. 23. The SMU of claim 22 , wherein the combination circuitry comprises weighting circuitry configured to form a weighted combination of the first signal, the second signal, and the third signal. 24. A source measure unit (SMU) configured to operate in a plurality of modes including a voltage-controlled mode and a current-controlled mode, the SMU comprising: combination circuitry configured to generate, when the SMU transitions between the voltage-controlled mode and the current controlled mode, a control signal to provide to a control circuit of the SMU, the control signal being generated by combining a first signal, a second signal and a third signal, wherein the first signal is indicative of a first voltage error of a voltage relative to an upper voltage threshold, wherein the second signal is indicative of a current error of a current relative to a target current, and wherein the third signal is indicative of a second voltage error of the voltage relative to a lower voltage threshold. 25. The SMU of claim 24 , wherein the combination circuitry comprises weighting circuitry configured to formed a weighted combination of the first signal, the second signal, and the third signal.
Current or voltage test · CPC title
Voltage or current aspects, e.g. driver, receiver · CPC title
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