Well Modulation for Defect Inspection
US-2024079278-A1 · Mar 7, 2024 · US
US9202760B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9202760-B2 |
| Application number | US-201213533379-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 26, 2012 |
| Priority date | Jun 26, 2012 |
| Publication date | Dec 1, 2015 |
| Grant date | Dec 1, 2015 |
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Devices, semiconductor structures and methods are provided, where a substrate is around a semiconductor device is biased via a resistive element.
Opening claim text (preview).
In the claims: 1. A semiconductor structure, comprising: a first well of a first polarity provided in a substrate of a second polarity different from said first polarity, a well contact provided in said first well of the first polarity to be coupled with a first supply voltage, a semiconductor device in said first well, a second well of said second polarity with a higher doping concentration than said substrate arranged around said first well of the first polarity, said second well of the second polarity being coupled to a resistive element that is distinct from the substrate, said resistive element to be coupled with a second supply voltage and is located above the substrate, wherein said resistive element comprises at least one of a resistor or a transistor. 2. A semiconductor structure, comprising: a first well of a first polarity provided in a substrate of a second polarity different from said first polarity, a well contact provided in said first well of the first polarity to be coupled with a first supply voltage, a semiconductor device in said first well, a second well of said second polarity with a higher doping concentration than said substrate arranged around said first well of the first polarity, said second well of the second polarity being coupled to a resistive element that is distinct from the substrate, said resistive element to be coupled with a second supply voltage and is located above the substrate; a third well of said second polarity arranged in said first well of said first polarity and a fourth well of said second polarity arranged in said first well of the first polarity, and a gate electrode on said substrate between said third well and said fourth well; a fifth well of said second polarity having a higher doping concentration than said substrate and being arranged in said substrate, a distance between said fifth well of said second polarity and said second well of said second polarity being at least a predetermined distance, the fifth well of said second polarity to be coupled with said second supply voltage via a connection having a resistance smaller than the resistance of said resistive element. 3. The semiconductor structure of claim 2 , further comprising a sixth well of said first polarity being provided between said second well of said second polarity and said fifth well of said second polarity, said sixth well of said first polarity to be coupled with a third supply voltage.
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Insulated-gate field-effect transistors [IGFET] (H10D30/40 takes precedence) · CPC title
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