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US-2024287680-A1 · Aug 29, 2024 · US
Method of making polycrystalline monolithic magnesium aluminate spinels
US9200366B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9200366-B2 |
| Application number | US-201113314507-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 8, 2011 |
| Priority date | Aug 27, 2007 |
| Publication date | Dec 1, 2015 |
| Grant date | Dec 1, 2015 |
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Abstract
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Methods of making polycrystalline monolithic magnesium aluminate spinels are disclosed. The polycrystalline monolithic magnesium aluminate spinels have small grain sizes and may be deposited on substrates as thick one-piece deposits. The polycrystalline monolithic magnesium aluminate spinels may be prepared and deposited by chemical vapor deposition using magnesium and aluminum gaseous precursors.
First claim
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What is claimed is: 1. A method comprising: a) providing gaseous precursors of polycrystalline monolithic magnesium aluminate in a chemical vapor deposition chamber, wherein a source of magnesium is chosen from magnesium halides and a source of aluminum is chosen from aluminum halides, aluminum carbonyls and aluminum acetonates and a source of oxygen is chosen from O 2 , CO 2 , NO 2 , H 2 O 2 , O 3 , N 2 O and H 2 O; b) reacting the gaseous precursors in the chemical vapor depos…
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Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Cross-Sectional Technologies · mapped topic
Chemistry & Metallurgy · mapped topic
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- What does patent US9200366B2 cover?
- Methods of making polycrystalline monolithic magnesium aluminate spinels are disclosed. The polycrystalline monolithic magnesium aluminate spinels have small grain sizes and may be deposited on substrates as thick one-piece deposits. The polycrystalline monolithic magnesium aluminate spinels may be prepared and deposited by chemical vapor deposition using magnesium and aluminum gaseous precursors.
- Who is the assignee on this patent?
- Goela Jitendra S, Stern Heather A G, Rohm & Haas Elect Mat
- What technology area does this patent fall under?
- Primary CPC classification C23C16/403. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Dec 01 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).