Method for depositing a thin film, and resulting material

Patent metadata

Field	Value
Publication number	US-9199874-B2
Application number	US-201013322995-A
Country	US
Kind code	B2
Filing date	Jun 4, 2010
Priority date	Jun 5, 2009
Publication date	Dec 1, 2015
Grant date	Dec 1, 2015

Abstract

A method of obtaining a substrate coated on a first face with at least one transparent and electrically conductive thin layer based on at least one oxide, including depositing the at least one thin layer on the substrate and subjecting the at least one thin layer to a heat treatment in which the at least one layer is irradiated with aid of radiation having a wavelength between 500 and 2000 nm and focused on a zone of the at least one layer, at least one dimension of which does not exceed 10 cm. The radiation is delivered by at least one radiation device facing the at least one layer, a relative displacement being created between the radiation device and the substrate to treat the desired surface, the heat treatment being such that resistivity of the at least one layer is reduced during the treatment.

First claim

The invention claimed is:

1. A method of obtaining a substrate coated on a first face with at least one transparent and electrically conductive thin layer based on at least one oxide, comprising:
depositing the at least one thin layer on the substrate;
subjecting the at least one thin layer to a heat treatment in which the at least one layer is irradiated with aid of radiation having a wavelength of between 700 nm and 1,300 nm, the radiation being delivered by at least one radiation device placed facing the at least one layer, said radiation device emitting a linear laser beam that simultaneously irradiates all of the width of the substrate, the emitted linear beam forming a laser beam line having a thickness between about 0.004 mm and about 1 mm and a length of at least 5 mm; and
creating a relative displacement between the radiation device and the substrate so as to perform the heat treatment of the at least one thin layer, the heat treatment being such that resistivity of at least on layer is reduced during the heat treatment.

2. The method as claimed in claim 1 , wherein the resistivity of the transparent and electrically conductive layer, or its sheet resistance, is reduced by at least 60% relative to the resistivity or the sheet resistance measured before heat treatment.

3. The method as claimed in claim 1 , wherein the substrate is made of glass or organic polymer material.

4. The method as claimed in claim 1 , wherein the at least one thin layer is based on at least one oxide selected from among mixed oxides of indium and tin, mixed oxides of indium and zinc, zinc oxide doped with gallium and/or aluminum and/or titanium and/or indium, titanium oxide doped with niobium and/or tantalum, cadmium or zinc stannate, tin oxide doped with fluorine and/or antimony.

5. The method as claimed in claim 4 , wherein the at least one thin layer has after the heat treatment a resistivity of less than or equal to 7·10 −4 ohm·cm, and an absorption less than or equal to 1.2%, for a layer thickness of 100 nm.

6. The method as claimed in claim 1 , wherein the at least one thin layer is covered before the heat treatment with a thin layer based on carbon, or of graphite or amorphous type.

7. The method as claimed in claim 1 , wherein the laser beam line heats the at least one layer during the heat treatment to at least 300° C. without melting the at least one layer, and such that a temperature of an opposite face of the substrate from the first face does not exceed 100° C. during the heat treatment.

8. The method as claimed in claim 1 , wherein the surface power density of the radiation is greater than or equal to 10 kW/cm 2 .

9. The method as claimed in claim 1 , wherein the at least one thin layer is deposited by magnetic field enhanced cathode sputtering.

10. The method as claimed in claim 1 ,
wherein the at least one thin layer comprises zinc oxide doped with aluminum and/or gallium, and
wherein the heat treatment forms a surface morphology having a plurality of grains on the at least one thin layer, each of the plurality of grains having a dimension of between 100 nm and 200 nm, and said each of the plurality of grains being fragmented into a plurality of elementary grains.

11. The method as claimed in claim 1 , wherein the at least one radiation device is a linear array of laser diodes.

12. The method as claimed in claim 1 , wherein the linear laser beam is composed of a single laser line or a plurality of laser lines.

13. The method as claimed in claim 1 , wherein the at least one transparent and electrically conductive thin layer based on at least one oxide is a continuous thin layer deposited to cover substantially all of the substrate, and the thin layer remains continuous during the heat treatment.

14. The method as claimed in claim 4 , wherein the at least one thin layer has after the heat treatment a resistivity of less than or equal to 6·10 −4 ohm·cm, and an absorption less than or equal to 1%, for a layer thickness of 100 nm.

15. The method as claimed in claim 1 , wherein the heat treatment of the at least one thin layer is performed for less than or equal to 1 second.

16. The method as claimed in claim 1 , wherein, during the heat treatment, the laser beam line heats each point of the at least one layer to at least 300° C. without melting the at least one layer, while maintaining a temperature that does not exceed 100° C. at each point of an opposite face of the substrate from the first face.

Assignees

• Peter Emmanuelle
• Kharchenko Andriy
• Nadaud Nicolas
• Saint Gobain

Inventors

• Peter Emmanuelle
• Kharchenko Andriy
• Nadaud Nicolas

Classifications

• H10P34/00

  Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices · CPC title

• C03C17/3678

  specially adapted for use in solar cells · CPC title

• C03C17/3441

  comprising carbon, a carbide or oxycarbide · CPC title

• C23C14/086

  of zinc, germanium, cadmium, indium, tin, thallium or bismuth · CPC title

• Y10T428/24364

  with transparent or protective coating · CPC title