Multi-layer single chip MEMS WLCSP fabrication
US-10106399-B1 · Oct 23, 2018 · US
Sensor protective coating
US9199840B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9199840-B2 |
| Application number | US-201314069633-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 1, 2013 |
| Priority date | Nov 1, 2013 |
| Publication date | Dec 1, 2015 |
| Grant date | Dec 1, 2015 |
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Abstract
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A method of fabricating a sensor device includes forming a plurality of sensor structures on a wafer, covering the plurality of sensor structures with a polymer layer, and dicing the wafer into a plurality of die while each sensor structure remains covered by the polymer layer.
First claim
Opening claim text (preview).
The invention claimed is: 1. A method of fabricating a sensor device, the method comprising: forming a plurality of sensor structures on a wafer; covering the plurality of sensor structures with a polymer layer; dicing the wafer into a plurality of die while each sensor structure remains covered by the polymer layer; and removing at least part of the polymer layer from each die after dicing the wafer. 2. The method of claim 1 , wherein: forming the pl…
Assignees
Inventors
Classifications
- B81C1/00896Primary
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
- B81C1/00825Primary
Operations & Transport · mapped topic
Operations & Transport · mapped topic
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Frequently asked questions
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- What does patent US9199840B2 cover?
- A method of fabricating a sensor device includes forming a plurality of sensor structures on a wafer, covering the plurality of sensor structures with a polymer layer, and dicing the wafer into a plurality of die while each sensor structure remains covered by the polymer layer.
- Who is the assignee on this patent?
- Bilic Dubravka, Hooper Stephen R, Freescale Semiconductor Inc
- What technology area does this patent fall under?
- Primary CPC classification B81C1/00896. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Tue Dec 01 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).