Replacement metal gate transistor with controlled threshold voltage

US9190409B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9190409-B2
Application numberUS-201414187745-A
CountryUS
Kind codeB2
Filing dateFeb 24, 2014
Priority dateFeb 25, 2013
Publication dateNov 17, 2015
Grant dateNov 17, 2015

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Abstract

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A method and structure for a semiconductor device includes a semiconductor substrate and an N-channel transistor and a P-channel transistor provided on the semiconductor substrate. Each of the N-channel transistor and the P-channel transistor has a gate dielectric film on the semiconductor substrate, and a gate electrode is formed on the gate dielectric. The gate electrode comprises a metal conductive layer. The oxygen concentration in the metal conductive layer for the N-channel transistor is different from that for the P-channel transistor.

First claim

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Having thus described my invention, what I claim as new and desire to secure by Letters Patent is as follows: 1. A semiconductor device, comprising: a semiconductor substrate; and an N-channel transistor and a P-channel transistor provided on the semiconductor substrate, each of the N-channel transistor and the P-channel transistor respectively having a gate dielectric film on said semiconductor substrate, and a gate electrode respectively formed on said gate dielectric, wher…

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What does patent US9190409B2 cover?
A method and structure for a semiconductor device includes a semiconductor substrate and an N-channel transistor and a P-channel transistor provided on the semiconductor substrate. Each of the N-channel transistor and the P-channel transistor has a gate dielectric film on the semiconductor substrate, and a gate electrode is formed on the gate dielectric. The gate electrode comprises a metal con…
Who is the assignee on this patent?
Renesas Electronics Corp, IBM
What technology area does this patent fall under?
Primary CPC classification H10D84/856. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Nov 17 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).