Sulfonyl photoacid generators and photoresists comprising same
US-2017153542-A1 · Jun 1, 2017 · US
US9187416B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9187416-B2 |
| Application number | US-201113885202-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 9, 2011 |
| Priority date | Dec 17, 2010 |
| Publication date | Nov 17, 2015 |
| Grant date | Nov 17, 2015 |
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Described herein is a composition according to formula I or its precursor, formula II: CX 1 X 3 ═CX 2 —(R 1 ) p —CZ1 Z2-SO 2 M (I) wherein X 1 , X 2 , and X 3 are independently selected from H, F, Cl, Br, I, CF 3 and CH 3 , and wherein at least one of X 1 , X 2 , or X 3 is a H; R 1 is a linking group; Z1 and Z2 are independently selected from F, Cl, Br, I, CF 3 , and a perfluoroalkyl group; p is 0 or 1; and M is a cation; and CX 4 X 1 X 3 —CX 5 X 2 —(R 1 ) p —CZ1Z2-SO 2 M (II) wherein X 1 , X 2 , and X 3 are independently selected from H, F, Cl, Br, I, CF 3 and CH 3 , wherein at least one of X 1 , X 2 , or X 3 is a H, and X 4 and X 5 are independently selected from H, F, Cl, Br and I; R 1 is a linking group; Z1 and Z2 are independently selected from F, Cl, Br, I, CF 3 , and a perfluoroalkyl group, p is 0 or 1; and M is selected from F, and a cation.
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What is claimed is: 1. A monomer according to formula I: CX 1 X 3 ═CX 2 —(R 1 ) p —CZ1Z2-SO 2 M (I) wherein X 1 , X 2 , and X 3 are independently selected from H, F, Cl, Br, I, CF 3 and CH 3 , and wherein at least one of X 1 , X 2 , or X 3 is a H; R 1 is a linking group; Z1 and Z2 are independently selected from F, Cl, Br, I, CF 3 , and a perfluoroalkyl group; p is 0 or 1; and M is a cation. 2. The monomer according to claim 1 , wherein X 1 , X 2 , and X 3 are all H and R 1 is a perfluorinated group. 3. The monomer according to claim 1 , wherein R 1 is selected from: —(CH 2 ) a —, —(CF 2 ) a —, —(CF 2 ) a —O—(CF 2 ) b —, —(CF 2 ) a —[O—(CF 2 ) b ] c —, and —[(CF 2 ) a —O—] b —[(CF 2 ) c —O—] d , and combinations thereof, wherein a, b, c, and d are independently at least 1, 2, 3, 4, 10, 20, etc. 4. The monomer according to claim 1 , wherein the monomer is selected from formula Ia or Ib: CH 2 ═CH—(CF 2 ) 4 —SO 2 M (Ia); and CH 2 ═CH—(CF 2 ) 2 O(CF 2 ) 2 —SO 2 M (Ib); where M is a cation. 5. The monomer according to claim 1 , wherein M is selected from: H + , Na + , Li + , Cs + , NH 4 + , and K + .
from sulfonic acids, by reactions not involving the formation of sulfo or halosulfonyl groups; {from sulfonic halides by reactions not involving the formation of halosulfonyl groups} · CPC title
with non-fluorinated comonomers · CPC title
Sulfinic acids; Esters thereof · CPC title
of hydrocarbons and halogenated hydrocarbons · CPC title
of a carbon skeleton substituted by singly-bound oxygen atoms · CPC title
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